Universal generators for your sputtering process
The TruPlasma Bias Series 4000 is a state-of-the-art family of pulsed DC bias generators. They offer pulse frequencies of up 100 kHz and continuous bias output. In particular, the generators support the optical and metallic coating applications used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.
1200 V for substrate etching processes,
300 V for bias-supported coating processes.
As a result, there is significantly less droplet deposition and substrate damage.
Excellent arc management due to state-of-the-art DSP technology and FPGA signal processing.
Manufacture of wear-resistant layers
Generators in the TruPlasma Bias Series 4000 ensure that the plasma process is stable and the coating quality is optimal.
Coating of large areas
Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Bias Series 4000 offer all of the requirements for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.
Photovoltaic cell production
The generators of the TruPlasma Bias Series 4000 prove themselves in all critical PVD and PECVD processes and offer all of the requirements for a power supply that is stable and optimally adapted to the respective process, ensuring excellent, reproducible results.
TruPlasma Bias 4012
TruPlasma Bias 4018
TruPlasma Bias 4026
|Rated power||12 kW||18 kW||26 kW|
|Maximum output current||40 A eff||60 A eff||87 A eff|
|Maximum output voltage||1200 V eff||1200 V eff||1200 V eff|
|Nominal operating frequency||0 kHz - 100 kHz||0 kHz - 100 kHz||0 kHz - 100 kHz|
|Maximum arc rate||50 1/s||50 1/s||50 1/s|
|Arc treatment time||<0.5 µs||<0.5 µs||<0.5 µs|
|Network connection data|
|Line voltage||3x 360 V - 440 V||3x 360 V - 440 V||3x 360 V - 440 V|
|Line frequency||50 Hz - 60 Hz||50 Hz - 60 Hz||50 Hz - 60 Hz|
|RS 232 / RS 485||-||yes||-|
|Weight||70 kg||70 kg||71 kg|
|IP protection class||IP 20||IP 20||IP 20|
|Coolant temperature||5 °C - 35 °C||5 °C - 35 °C||5 °C - 35 °C|
|Overall efficiency||90 %||90 %||90 %|
|Certificates / standards||CE||CE||CE|
|Outside temperature||5 °C - 35 °C||5 °C - 35 °C||5 °C - 35 °C|
|Humidity||5 % - 85 %||5 % - 85 %||5 % - 85 %|
|Barometric pressure||860 kPa - 1060 kPa||860 kPa - 1060 kPa||860 kPa - 1060 kPa|
Ensures that process conditions remain consistently good
The special power and control design ensures sound voltage stability, which is crucial for coating quality and a stable process. Designed using DSP technology and equipped with FPGA signal processing, the TruPlasma Bias Series 4000 has modern arc management, which offers a unique degree of accuracy and repetition accuracy. The impressive values of both parameters ensure optimal process stabilization.
Simplified system handling with a single device for multiple processes
The TruPlasma Bias Series 4000 has two separate voltage modes: a high-voltage mode with up to 1200 volts and a low-voltage mode with up to 300 volts. In particular, the modes support optical and metallic coating applications that are used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.
Seamless processes result in optimal coating quality
The generators in the TruPlasma Bias Series 4000 have completely digital arc management with very low arc energy and CompensateLine, thus enabling high coating quality and deposit rates. This means there is less droplet deposition and substrate damage, improving both the process and the product.
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.