The latest generation of compact DC generators
The TruPlasma DC Series 3000 (G2) is suitable for a number of DC sputtering processes – including use as a replacement for pulsed process power supplies. This is because progressive arc management offers a guarantee for the best layer qualities and a significantly higher production yield. Because of its extremely compact design you can integrate the water-cooled DC generators very easily into your current application.
Residual energies of < 0.3 mJ/kW guarantee the best layer qualities and high deposition rates.
Very compact design (19-inch plug-in unit) results in simple integration, even for larger power levels.
Output power of 20 kW to 300 kW, so use as a replacement for larger generators is also possible.
Enables long system runtimes and reduces maintenance.
Variable line voltage (400 V to 480 V) and different data interfaces.
Hard material coating
The application of functional coatings using DC magnetron sputtering provides workpieces that undergo a lot of use with increased surface hardness and static friction, as well as better thermal and chemical stability. TruPlasma DC Series 3000 (G2) direct current generators ensure that the plasma process is stable and thus that the coating quality is optimal.
Metallization
A PVD process is used to apply a paper-thin metal layer to various materials in order to provide them with the best possible optical and electrical properties. A power supply that has been optimally adapted to the process parameters enables the deposit of absolutely homogeneous, defect-free layers.
Photovoltaic cell production
In order to influence the electrical properties, photovoltaic cells, as well as flat screens and touchscreens, are coated with electrically conductive materials (TCO). As a result of their very low residual arc energy, TruPlasma DC Series 3000 (G2) direct current generators are ideally suited for this.
Architectural glass
The large area coating of architectural glass in a direct current sputtering process places particularly high demands on the process power supply. TruPlasma DC Series 3000 (G2) direct current generators offer the ideal conditions for high-quality coating results.
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TruPlasma DC 3020 (G2)
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TruPlasma DC 3030 (G2)
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TruPlasma DC 3040 (G2)
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TruPlasma DC 3060 (G2)
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TruPlasma DC 3080 (G2)
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TruPlasma DC 3120 (G2)
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TruPlasma DC 3160 (G2)
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| Output | |||||||
| Rated power | 20 kW | 30 kW | 40 kW | 60 W | - | - | - |
| Maximum output current | 50 A eff | 75 A eff | 100 A eff | 150 A eff | - | - | - |
| Maximum output voltage | 1000 V eff | 1000 V eff | 1000 V eff | 1000 V eff | - | - | - |
| Arc parameter | |||||||
| Maximum arc rate | 8000 1/s | 8000 1/s | 8000 1/s | 8000 1/s | - | - | - |
| Arc energy | <0.3 mJ/kW | <0.3 mJ/kW | <0.3 mJ/kW | <0.3 mJ/kW | - | - | - |
| Arc treatment time | <0.1 µs | <0.1 µs | <0.1 µs | <0.1 µs | - | - | - |
| Ignition voltages | |||||||
| with auxiliary ignition | 1500 V | 1500 V | 1500 V | 1500 V | - | - | - |
| without auxiliary ignition | 1000 V | 1000 V | 1000 V | 1000 V | - | - | - |
| Network connection data | |||||||
| Line voltage | (±10%) 360 V - 528 V | 3x 360 V - 528 V | 3x 360 V - 528 V | 3x 360 V - 528 V | - | - | - |
| Line frequency | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | - | - | - |
| Communication interfaces | |||||||
| Analog/digital | yes | yes | yes | - | - | - | - |
| RS 232 / RS 485 | yes | yes | yes | - | - | - | - |
| PROFIBUS | yes | yes | yes | - | - | - | - |
| EtherCAT | yes | yes | yes | - | - | - | - |
| DeviceNet | yes | yes | yes | - | - | - | - |
| Housing | |||||||
| Weight | 45 kg | 65 kg | 65 kg | - | - | - | - |
| IP protection class | 40 | 40 | 40 | - | - | - | - |
| Cooling requirements | |||||||
| Coolant | Water | Water | Water | - | - | - | - |
| Maximum water pressure | 7 bar | 7 bar | 7 bar | - | - | - | - |
| Minimum pressure difference | 1.5 bar | 1.5 bar | 1.5 bar | - | - | - | - |
| Minimum flow rate | 4 l/min | 8 l/min | 8 l/min | - | - | - | - |
| Coolant temperature | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C | - | - | - | - |
| DC connection data | |||||||
| Number of terminals | 3 | 3 | 3 | - | - | - | - |
| Nominal current / terminal | 35 A | 53 A | 53 A | - | - | - | - |
| General | |||||||
| Overall efficiency | 90 % | 90 % | 90 % | - | - | - | - |
| Certificates / standards | CE | CE | CE | - | - | - | - |
| Ambient conditions | |||||||
| Outside temperature | 5 °C | 5 °C - 45 °C | 5 °C - 45 °C | - | - | - | - |
| Humidity | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % | - | - | - | - |
| Barometric pressure | 860 kPa - 1060 kPa | 860 kPa - 1060 kPa | 860 kPa - 1060 kPa | - | - | - | - |
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TruPlasma DC 3020 (G2)
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TruPlasma DC 3030 (G2)
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TruPlasma DC 3040 (G2)
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TruPlasma DC 3060 (G2)
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TruPlasma DC 3080 (G2)
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TruPlasma DC 3120 (G2)
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TruPlasma DC 3160 (G2)
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|---|---|---|---|---|---|---|---|
| Output | |||||||
| Rated power | 20 kW | 30 kW | 40 kW | 60 W | - | - | - |
| Maximum output current | 50 A eff | 75 A eff | 100 A eff | 150 A eff | - | - | - |
| Maximum output voltage | 1000 V eff | 1000 V eff | 1000 V eff | 1000 V eff | - | - | - |
| Arc parameter | |||||||
| Maximum arc rate | 8000 1/s | 8000 1/s | 8000 1/s | 8000 1/s | - | - | - |
| Arc energy | <0.3 mJ/kW | <0.3 mJ/kW | <0.3 mJ/kW | <0.3 mJ/kW | - | - | - |
| Arc treatment time | <0.1 µs | <0.1 µs | <0.1 µs | <0.1 µs | - | - | - |
| Ignition voltages | |||||||
| with auxiliary ignition | 1500 V | 1500 V | 1500 V | 1500 V | - | - | - |
| without auxiliary ignition | 1000 V | 1000 V | 1000 V | 1000 V | - | - | - |
| Network connection data | |||||||
| Line voltage | (±10%) 360 V - 528 V | 3x 360 V - 528 V | 3x 360 V - 528 V | 3x 360 V - 528 V | - | - | - |
| Line frequency | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz | - | - | - |
| Communication interfaces | |||||||
| Analog/digital | yes | yes | yes | - | - | - | - |
| RS 232 / RS 485 | yes | yes | yes | - | - | - | - |
| PROFIBUS | yes | yes | yes | - | - | - | - |
| EtherCAT | yes | yes | yes | - | - | - | - |
| DeviceNet | yes | yes | yes | - | - | - | - |
| Housing | |||||||
| Weight | 45 kg | 65 kg | 65 kg | - | - | - | - |
| IP protection class | 40 | 40 | 40 | - | - | - | - |
| Cooling requirements | |||||||
| Coolant | Water | Water | Water | - | - | - | - |
| Maximum water pressure | 7 bar | 7 bar | 7 bar | - | - | - | - |
| Minimum pressure difference | 1.5 bar | 1.5 bar | 1.5 bar | - | - | - | - |
| Minimum flow rate | 4 l/min | 8 l/min | 8 l/min | - | - | - | - |
| Coolant temperature | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C | - | - | - | - |
| DC connection data | |||||||
| Number of terminals | 3 | 3 | 3 | - | - | - | - |
| Nominal current / terminal | 35 A | 53 A | 53 A | - | - | - | - |
| General | |||||||
| Overall efficiency | 90 % | 90 % | 90 % | - | - | - | - |
| Certificates / standards | CE | CE | CE | - | - | - | - |
| Ambient conditions | |||||||
| Outside temperature | 5 °C | 5 °C - 45 °C | 5 °C - 45 °C | - | - | - | - |
| Humidity | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % | - | - | - | - |
| Barometric pressure | 860 kPa - 1060 kPa | 860 kPa - 1060 kPa | 860 kPa - 1060 kPa | - | - | - | - |
The technical data of all product versions as a download.
Low-cost alternative to pulsed generators
With their state-of-the-art arc management, TruPlasma DC Series 3000 (G2) direct current generators prove themselves in many sputtering processes. As a low-cost alternative to pulsed DC generators they also offer a significantly higher production yield.
Compact alternative for higher output
Despite their very compact design, the TruPlasma Series 3000 (G2) direct current generators beat even larger generators in terms of coating quality and productivity. They thus represent a compact and easily integrated alternative, even for a high output power of more than 60 kW.
Water cooling for longer system runtimes
TruPlasma DC Series 3000 (G2) direct current generators have their own complete water cooling system. Compared to air cooled devices, these systems enable a higher system runtime, reduce maintenance costs, and prevent contamination as a result of dust particles.
Various options enable optimal adjustment of the direct current generator to your application.
Several DC generators in the TruPlasma DC Series 3000 (G2) can be operated simultaneously. This mode enables the synchronization of the arc recognition of several generators geared toward different targets. The pulse mode can be synchronized as well. If high output power is required, a parallel circuit of up to 5 TruPlasma DC 3030 generators is possible. This functions as a TruPlasma DC 3150 unit.
Water valve control regulates the cooling water flow to avoid condensation and simultaneously protect the generator against overheating.
EtherCAT and EtherNET/IP interfaces enable simple integration of the TruPlasma DC Series 3000 (G2) in current systems.
PVD Power
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
