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TruPlasma MF Series 7000 (G2)
TruPlasma MF Series 7000 (G2)
Plasma excitation
TRUMPF Hüttinger

TruPlasma MF Series 7000 (G2)

The best in its class

Complete control over the process

The TruPlasma Series MF 7000 (G2) puts you in control of your process at all times: With their superior arc management and ignition behavior, the generators are perfect as power supplies for large area coating and demanding reactive processes during dual magnetron sputtering. Featuring peak efficiencies of more than 90%, and particularly efficient cooling water management, the generators are also extremely cost-effective to operate.

Highest coating quality and productivity

Excellent results and high coating rates, even in the most difficult reactive processes.

Maximum efficiency

Featuring peak efficiencies
of over 90%, operating efficiencies of over 80% are achieved.

Stable power supply in all ambient conditions

Reliable functioning, even with high cooling water temperatures and low differential pressures.

Can be used worldwide

Variable supply voltage, meaning that no technical adjustment is required.

First-rate MF power supply, ideal for large area coating

First-rate MF power supply

Large area coating of architectural glazing: Sophisticated materials such as SiOx place high demands on the stability of the power supply.

First-rate MF power supply for the coating of flat screens

Application of the thinnest layers

Coating of flat screens and touch panels: Dual magnetron sputtering is used to apply ultra-thin (nm), high-strength, and homogeneous AlxOx coatings.

TruPlasma MF Series 7000 (G2) MF generators for the application of ultra-thin layers

Photovoltaic cell production

Coating of solar glass: The stable power supply of the TruPlasma MF Series 7000 (G2) enables the homogeneous application of ultra-thin transparent conductive coatings (TCO) using MF sputtering.

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Output                    
Rated output 50 kW 75 kW 100 kW 120 kW 150 kW 50 kW 75 kW 100 kW 120 kW 150 kW
Maximum output current 110 A eff 200 A eff 225 A eff 300 A eff 350 A eff 110 A eff 200 A eff 225 A eff 300 A eff 350 A eff
Maximum output voltage 1100 V eff 1100 V eff 1100 V eff 1100 V eff 1100 V eff 1100 V eff 1100 V eff 1100 V eff 1100 V eff 1100 V eff
Nominal operating frequency 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz 20 kHz - 50 kHz
Arc parameter                    
Maximum arc rate 8000 1/s 8000 1/s 8000 1/s 8000 1/s 8000 1/s 8000 1/s 8000 1/s 8000 1/s 8000 1/s 8000 1/s
Arc energy 10 mJ/kW 10 mJ/kW 10 mJ/kW 10 mJ/kW 10 mJ/kW 1 mJ/kW 1 mJ/kW 1 mJ/kW 1 mJ/kW 1 mJ/kW
Arc treatment time 50 µs 50 µs 50 µs 50 µs 50 µs 25 µs 25 µs 25 µs 25 µs 25 µs
Ignition voltage                    
with auxiliary ignition 3100 V 3100 V 3100 V 3100 V 3100 V 3100 V 3100 V 3100 V 3100 V 3100 V
without auxiliary ignition 790 V 790 V 790 V 790 V 790 V 790 V 790 V 790 V 790 V 790 V
Network connection data                    
Line voltage (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V (±10%) 380 V - 480 V
Line frequency 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz
Network input power 61 kVA 93 kVA 124 kVA 149 kVA 186 kVA 61 kVA 93 kVA 124 kVA 149 kVA 186 kVA
Power factor 0.95 0.95 0.95 0.95 0.95 0.95 0.95 0.95 0.95 0.95
Housing                    
Weight 560 kg 610 kg 610 kg 660 kg 660 kg 560 kg 610 kg 610 kg 660 kg 660 kg
IP protection class 54 54 54 54 54 54 54 54 54 54
Cooling requirements                    
Coolant Water Water Water Water Water Water Water Water Water Water
Max. water pressure 6 bar 6 bar 6 bar 6 bar 6 bar 6 bar 6 bar 6 bar 6 bar 6 bar
Min. pressure differential 2.2 bar 2.2 bar 2.2 bar 2.5 bar 2.5 bar 2.2 bar 2.2 bar 2.2 bar 2.5 bar 2.5 bar
Min. flow rate 28 l/min 30 l/min 30 l/min 34 l/min 34 l/min 30 l/min 31 l/min 31 l/min 36 l/min 36 l/min
Coolant temperature 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C
General                    
Overall efficiency 91 % 91 % 91 % 91 % 91 % 91 % 91 % 91 % 91 % 91 %
Certificates / standards CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18 CE, SEMI S2-0709, FCC standard part 18
Ambient conditions                    
Outside temperature 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C 5 °C - 40 °C
PDF <1MB
Technical data sheet

The technical data of all product versions as a download.

The TruPlasma MF Series 7000 (G2) generators guarantee the highest efficiency

Maximum cost-effectiveness and flexibility

The high operating efficiencies and the flexible cooling concept of the TruPlasma MF Series 7000 (G2) guarantee maximum cost-effectiveness over the entire service life. Even under difficult ambient and installation conditions, the power supply remains stable at all times – high cooling water temperatures, low water pressures, and high humidity levels do not impair the process quality. With its wide operating voltage range, you can use the MF generator worldwide without technical modifications.

TruPlasma MF Series 7000 (G2) MF generators

Precise process control

With just a few parameter settings, you can precisely control the coating quality and productivity. This helps you achieve an optimal balance between the sensitivity of the ARC treatment and the desired throughput. A variety of interfaces and the convenient TruControl Power operating program also enable effective configuration and diagnostics.

Arc management

Superior ARC management

High reaction speeds and correspondingly reduced residual energy ensure stable processes and the highest possible sputter rates. Arc formation and thermal stress on the targets is reliably detected and prevented by the generator – the result is absolutely homogeneous coatings across the entire substrate surface. The fast and reliable arc management also enables trouble-free operation of the generator in the voltage-controlled transition range (transition mode).

A comprehensive range of options is available for the TruPlasma MF Series 7000 (G2) to help you adjust your MF generator to meet the requirements of your application.

Extended frequency range

The MF generators with power up to 100 kW are available as an option with an extended frequency range of 20 - 70 kHz (20 - 50 kHz is standard).

Auxiliary ignition

This reduces ARC formation and thermal stress. The ignition voltage and ramp time can be individually controlled.

Ultra-fast ARC management

The TruPlasma MF Series 7000 (G2) can be equipped with highly sensitive ARC management (UltraFastTreatment ≤ 1 mJ/kW; ≤ 10 mJ/kW is standard). Safety category 3 is required for UltraFastTreatment.

Equipped for every possibility

Profinet, Profibus, EtherCAT as well as analog and digital interfaces enable the simple integration of the TruPlasma MF Series 7000 into existing systems.

Switch cabinet door

The switch cabinet door is available with a particularly wide opening of 180 degrees as an option (130 degrees is standard).

Active switch cabinet dehumidification

For environments with very high humidity, the generator switch cabinet can be equipped with an active dehumidifier unit. Cooling water control is required to operate the unit.

User-friendly software TruControl Power

TruControl Power

The user-friendly, multilingual TruControl Power software offers you versatile options for operation, configuration, and diagnostics.

By selecting suitable system components, you can optimally adjust your TruPlasma MF Series 7000 (G2) to your system environment.

MF power cables
MF power cables

You receive optimized TRUMPF Hüttinger MF power cables with your TruPlasma MF Series 7000 (G2). The cables guarantee optimal system performance at all times.

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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Test and qualification center

At our test and qualification center (TQZ), every day experienced  application engineers ensure that product quality is constantly optimized.

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Available for you 24/7

Our 24h service hotline ensures a skilled service engineer is available to you – seven days a week, around the clock.

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Individualized customer training is our strong point

Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

Contact

Klaus Nock
Plasma Sales
Fax +49 761 89711150
E-mail

Downloads

TruPlasma MF Series 7000 (G2) brochure
TruPlasma MF Series 7000 (G2) brochure
pdf - 1 MB
Whitepaper Voltage controlled transition mode
pdf - 1 MB
Whitepaper Arc-Management
pdf - 1 MB
WhitePaper sine or square wave
pdf - 941 KB
Service & contact