The first choice for challenging plasma processes
TruPlasma DC Series 4000 generators are the first choice for demanding plasma processes. They provide full power over a broad load adjustment range. They are, therefore, well-suited for high-tech sputtering applications as well as additional standard or pulsed DC plasma applications. Like non-pulsed generators, they have excellent arc management.
Arc-related time losses are minimized due to state-of-the-art DSP control technology.
Improved results due to less droplet deposition and substrate damage.
Broad power range and pulse frequencies up to 100 kHz make it very flexible.
Reactive sputtering of heavy materials
TruPlasma DC Series 4000 pulsed generators have been specially developed for the reactive sputtering of heavy materials. The generators prove themselves in all critical PVD and PECVD processes, such as the production of photovoltaic cells and semiconductors as well as hard material coatings.
Demanding plasma processes
TruPlasma DC Series 4000 generators are the first choice for demanding plasma processes. They provide full power over a broad load adjustment range. They are, therefore, well-suited for high-tech sputtering applications as well as additional standard or pulsed DC plasma applications. Like non-pulsed generators, they have excellent arc management.
High efficiency
Completely digital arc management with very low arc energy ensures high coating quality and deposition rates. As a result, there is even less droplet deposition and substrate damage. Together with the very low residual arc energy this directly improves the process and end product. High productivity is ensured through stable and constant process times with very limited process interruptions.
User-friendly process adjustment
TruPlasma DC Series 4000 generators have synchronized arc management, pulse frequency, and phase shifting. The frequency and pulse parameters can be adjusted, meaning a number of different processes can be operated with a single device. It is also possible to pulse synchronously with several TruPlasma DC 4000 generators.
PVD power
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
