DC Plasma Excitation
Direct current generators from TRUMPF Hüttinger are classics when it comes to DC plasma excitation. They are mainly used in single cathode systems, for the application of conductive layers on solar cells and semi-conductors, as well as for the polarisation of substrates. Nowadays DC generators are used in numerous applications as an example of cost-effective entry technology into plasma excitation.
TruPlasma DC Series 3000 (G2)
As a new generation of DC generators, the TruPlasma DC Series 3000 (G2) is suitable for a variety of DC sputtering processes. The DC generators also make an interesting cost-effective alternative to pulsed DC generators due to their progressive arc management and the integrated water cooling. The very compact design also enables simple integration into existing applications.
TruPlasma DC Series 3000
With its broad power spectrum and fast arc recognition, the TruPlasma DC Series 3000 direct current generators ensure defect-free surfaces and high coating rates – even in very demanding direct current sputtering processes. Thanks to their air cooling, they are especially compact; the generators can easily be integrated into any system.
TruPlasma Arc Series 3000
The TruPlasma Arc Series 3000 generators are particularly impressive for hard material and decorative coatings. With its compact design and air cooling, valuable space is optimised and the unit can be easily integrated into new or existing systems.
TruPlasma Bias Series 3000
The TruPlasma Bias Series 3000 is a diverse group of state-of-the-art DC bias generators. All of the devices have two operating modes which specifically support optical and metallic coating applications. They are also suitable for applications with comparable voltage and current requirements.