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TruPlasma Bipolar 4040 bipolar generator
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TruPlasma Bipolar 4040 bipolar generator
Plasma excitation
TRUMPF Hüttinger

TruPlasma Bipolar Series 4000 (G2)

Maximum power on a flexible wave

    - / -
    • Overview
    • Applications
    • Technical data
    • Customer benefits
    • Software
    • System components
    • More Less
    Bipolar technology for the most demanding requirements

    The process power supplies from the TruPlasma Bipolar Series 4000 (G2) were specially developed for plasma-based coating by means of physical vapour deposition (PVD), plasma-enhanced chemical vapour deposition (PECVD) and reactive sputtering processes. Thanks to their configurable output signal and sophisticated ARC management, these latest generation, bipolar pulsers are extremely versatile. Regardless of whether the application is semi-conductor and solar cell manufacturing, or coating architectural glazing, you can always expect maximum performance in terms of coating quality and rates.

    Extremely low ARC energy

    Fully digital arc management for the highest coating quality and productivity.

    Configurable wave forms

    Simple adjustment to various processes by varying the output signal.

    One generator, numerous applications

    DC, pulsed DC and bipolar: save on costs thanks to diverse settings.

    Integrated water cooling

    No external components are required, meaning it only requires a small amount of space.

    Typical area of application of the TruPlasma Bipolar Series 4000 (G2): manufacture of wear-resistant layers

    First-rate power supply

    Typical areas of application include semi-conductor and photovoltaics production, coating architectural glazing and manufacturing decorative and wear-resistant coatings of the highest quality. PVD and PECVD processes, in particular, are used for this.

    Output          
    Rated power 10 kW 20 kW 30 kW 40 kW 60 kW
    Maximum output current 25 A eff 50 A eff 75 A eff 100 A eff 150 A eff
    Maximum output voltage 1000 V eff 1000 V eff 1000 V eff 1000 V eff 1000 V eff
    Nominal operating frequency 20 kHz - 80 kHz 20 kHz - 80 kHz 20 kHz - 80 kHz 20 kHz - 80 kHz 20 kHz - 80 kHz
    Arc parameter          
    Maximum arc rate 20000 1/s 20000 1/s 20000 1/s 20000 1/s 20000 1/s
    Arc energy 0.3 mJ/kW 0.3 mJ/kW 0.3 mJ/kW 0.3 mJ/kW 0.3 mJ/kW
    Ignition voltages          
    with auxiliary ignition 2000 V 2000 V 2000 V 2000 V 2000 V
    Network connection data          
    Line voltage 380 480 V 380 480 V 380 480 V 380 480 V 380 480 V
    Line frequency 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz
    Power factor 0.95 0.95 0.95 0.95 0.95
    Communication interfaces          
    Analog/digital Yes Yes Yes Yes Yes
    RS 232 / RS 485 Yes Yes Yes Yes Yes
    PROFIBUS Yes Yes Yes Yes Yes
    EtherCAT Yes Yes Yes
    -
    Yes Yes
    DeviceNet Yes Yes Yes
    -
    Yes Yes
    Housing          
    Width 482 mm 482 mm 482 mm 482 mm 482 mm
    Height 178 mm 266 mm 355 mm 355 mm 622 mm
    Depth 683 mm 683 mm 683 mm 683 mm 683 mm
    Weight 60 kg 60 kg 100 kg 100 kg 160 kg
    IP protection class IP40 IP40 IP40 IP40 IP40
    Cooling requirements          
    Coolant Water Water Water Water Water
    Max. water pressure 7 bar 7 bar 7 bar 7 bar 7 bar
    Min. pressure difference 3 bar 3 bar 3 bar 3 bar 3 bar
    Min. flow rate 4 l/min 8 l/min 8 l/min 12 l/min 12 l/min
    Cooling medium temperature 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C
    General          
    Overall efficiency 90 % 90 % 90 % 90 % 90 %
    Ambient conditions          
    Outside temperature 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C
    Humidity 5 % - 85 % 5 % - 85 % 5 % - 85 % 5 % - 85 % 5 % - 85 %
    Barometric pressure 86 kPa - 106 kPa 86 kPa - 106 kPa 86 kPa - 106 kPa 86 kPa - 106 kPa 86 kPa - 106 kPa
    PDF <1MB
    Technical data sheet

    The technical data of all product versions as a download.

    Arc management

    Perfect coatings, high productivity

    Completely digital arc management with very low arc energy ensures high coating quality and deposition rates. Even in demanding reactive processes, the TruPlasma Bipolar Series 4000 (G2) always guarantees a uniform process power supply and thus a stable plasma condition.

    Multiple applications thanks to flexible selection of the output signal

    More flexibility, lower costs

    Adjustable wave forms mean that you can very easily adjust the TruPlasma Bipolar Series 4000 (G2) generators to suit a variety of process requirements. Thanks to the flexible selection of the output signal (DC, pulsed DC or bipolar), they can be used with versatility, thereby helping to reduce your total cost of ownership (TCO).

    TruPlasma Bipolar 4060 bipolar generator

    Everything in a single housing

    No external components are needed thanks to the water cooling, which is fully integrated in the environmentally-protected generator housing.

    User-friendly software PVD Power

    PVD Power

    The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimising process quality and effective error correction: display of actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualisation of important operating parameters with high temporal resolution (oscilloscope function).

    By selecting from a variety of system components, you can optimally adjust your bipolar pulse generator to your system environment.

    Rear view of a generator from the TruPlasma Bipolar Series 4000 (G2)
    Mains cable

    Various cable and connector designs are available for different connection standards.

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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    Ideal geeignet für Großflächenbeschichtung
    Power supplies for your plasma process

    Plasma generators from TRUMPF Hüttinger have a broad power and frequency spectrum. Find out about our products here.

    Services_Electronics_Training
    Individualised customer training is our strong point

    Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

    Contact

    Klaus Nock
    Plasma Sales
    Fax: +49 761 89711150
    E-mail

    Downloads

    Brochure
    TruPlasma Bipolar Series 4000 (G2) brochure
    TruPlasma Bipolar Series 4000 (G2) brochure
    pdf - 1 MB
    Whitepaper Sinus oder Rechteck
    pdf - 941 KB
    Service & contact