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Plasma excitation

TRUMPF Hüttinger

TruPlasma MF Series 7000 (G2)

The best in its class

Complete control over the process

The TruPlasma Series MF 7000 (G2) puts you in control of your process at all times: with their superior arc management and ignition behaviour, the generators are perfect as power supplies for large area coating and demanding reactive processes in dual magnetron sputtering. With peak efficiencies of more than 90%, and particularly efficient cooling water management, the generators are also extremely cost-effective to operate.

Highest coating quality and productivity

Excellent results and high coating rates, even in the most difficult reactive processes.

Maximum efficiency

With peak efficiencies
of over 90%, operating efficiencies of over 80% are achieved.

Stable power supply in all ambient conditions

Reliable functioning, even with high cooling water temperatures and low differential pressures.

Can be used worldwide

Variable supply voltage, meaning that no technical adjustment is required.

First-rate MF power supply

Large area coating of architectural glazing: sophisticated materials such as SiOx place high demands on the stability of the power supply.

Application of the thinnest layers

Coating of flat screens and touch panels: dual magnetron sputtering is used to apply ultra-thin (nm), high-strength, and homogeneous AlxOx coatings.

TruPlasma MF Series 7000 (G2) MF generators for the application of ultra-thin layers

Photovoltaic cell production

Coating of solar glass: the stable power supply of the TruPlasma MF Series 7000 (G2) enables the homogeneous application of ultra-thin transparent conductive coatings (TCO) using MF sputtering.

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Output
Rated power	50 kW	75 kW	100 kW	120 kW	150 kW	50 kW	75 kW	100 kW	120 kW	150 kW
Maximum output current	110 A eff	200 A eff	225 A eff	300 A eff	350 A eff	110 A eff	200 A eff	225 A eff	300 A eff	350 A eff
Maximum output voltage	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff
Nominal operating frequency	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz
Arc parameter
Maximum arc rate	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s
Arc energy	1 mJ/kW	1 mJ/kW	1 mJ/kW	1 mJ/kW	1 mJ/kW	10 mJ/kW	10 mJ/kW	10 mJ/kW	10 mJ/kW	10 mJ/kW
Arc handling time	25 µs	25 µs	25 µs	25 µs	25 µs	50 µs	50 µs	50 µs	50 µs	50 µs
Ignition voltages
with auxiliary ignition	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V
without auxiliary ignition	790 V	790 V	790 V	790 V	790 V	790 V	790 V	790 V	790 V	790 V
Network connection data
Line voltage	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V
Line frequency	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz
Line input power	61 kVA	93 kVA	124 kVA	149 kVA	186 kVA	61 kVA	93 kVA	124 kVA	149 kVA	186 kVA
Power factor	0.95	0.95	0.95	0.95	0.95	0.95	0.95	0.95	0.95	0.95
Housing
Weight	560 kg	610 kg	610 kg	660 kg	660 kg	560 kg	610 kg	610 kg	660 kg	660 kg
IP protection class	54	54	54	54	54	54	54	54	54	54
Cooling requirements
Coolant	Water	Water	Water	Water	Water	Water	Water	Water	Water	Water
Max. water pressure	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar
Min. pressure difference	2.2 bar	2.2 bar	2.2 bar	2.5 bar	2.5 bar	2.2 bar	2.2 bar	2.2 bar	2.5 bar	2.5 bar
Min. flow rate	30 l/min	31 l/min	31 l/min	36 l/min	36 l/min	28 l/min	30 l/min	30 l/min	34 l/min	34 l/min
Cooling medium temperature	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C
General
Overall efficiency	91 %	91 %	91 %	91 %	91 %	91 %	91 %	91 %	91 %	91 %
Certificates / standards	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18
Ambient conditions
Outside temperature	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C

Compare products End comparison End comparison	TruPlasma MF 7050 (G2) UltraFast	TruPlasma MF 7075 (G2) UltraFast	TruPlasma MF 7100 (G2) UltraFast	TruPlasma MF 7120 (G2) UltraFast	TruPlasma MF 7150 (G2) UltraFast	TruPlasma MF 7050 (G2)	TruPlasma MF 7075 (G2)	TruPlasma MF 7100 (G2)	TruPlasma MF 7120 (G2)	TruPlasma MF 7150 (G2)
Output
Rated power	50 kW	75 kW	100 kW	120 kW	150 kW	50 kW	75 kW	100 kW	120 kW	150 kW
Maximum output current	110 A eff	200 A eff	225 A eff	300 A eff	350 A eff	110 A eff	200 A eff	225 A eff	300 A eff	350 A eff
Maximum output voltage	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff	1100 V eff
Nominal operating frequency	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz	20 kHz - 50 kHz
Arc parameter
Maximum arc rate	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s	8000 1/s
Arc energy	1 mJ/kW	1 mJ/kW	1 mJ/kW	1 mJ/kW	1 mJ/kW	10 mJ/kW	10 mJ/kW	10 mJ/kW	10 mJ/kW	10 mJ/kW
Arc handling time	25 µs	25 µs	25 µs	25 µs	25 µs	50 µs	50 µs	50 µs	50 µs	50 µs
Ignition voltages
with auxiliary ignition	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V	3100 V
without auxiliary ignition	790 V	790 V	790 V	790 V	790 V	790 V	790 V	790 V	790 V	790 V
Network connection data
Line voltage	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V	(±10%) 380 V - 480 V
Line frequency	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz	50/60 Hz
Line input power	61 kVA	93 kVA	124 kVA	149 kVA	186 kVA	61 kVA	93 kVA	124 kVA	149 kVA	186 kVA
Power factor	0.95	0.95	0.95	0.95	0.95	0.95	0.95	0.95	0.95	0.95
Housing
Weight	560 kg	610 kg	610 kg	660 kg	660 kg	560 kg	610 kg	610 kg	660 kg	660 kg
IP protection class	54	54	54	54	54	54	54	54	54	54
Cooling requirements
Coolant	Water	Water	Water	Water	Water	Water	Water	Water	Water	Water
Max. water pressure	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar	6 bar
Min. pressure difference	2.2 bar	2.2 bar	2.2 bar	2.5 bar	2.5 bar	2.2 bar	2.2 bar	2.2 bar	2.5 bar	2.5 bar
Min. flow rate	30 l/min	31 l/min	31 l/min	36 l/min	36 l/min	28 l/min	30 l/min	30 l/min	34 l/min	34 l/min
Cooling medium temperature	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C	5 °C - 45 °C
General
Overall efficiency	91 %	91 %	91 %	91 %	91 %	91 %	91 %	91 %	91 %	91 %
Certificates / standards	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18	CE, SEMI S2-0709, FCC standard part 18
Ambient conditions
Outside temperature	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C	5 °C - 40 °C

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Technical data sheet

The technical data of all product versions as a download.

The TruPlasma MF Series 7000 (G2) generators guarantee the highest efficiency

Maximum cost-effectiveness and flexibility

The high operating efficiencies and the flexible cooling concept of the TruPlasma MF Series 7000 (G2) guarantee maximum cost-effectiveness over the entire service life. Even under difficult ambient and installation conditions, the power supply remains stable at all times – high cooling water temperatures, low water pressures and high humidity levels do not impair the process quality. With its wide operating voltage range, you can use the MF generator worldwide without technical modifications.

TruPlasma MF Series 7000 (G2) MF generators

Precise process control

With just a few parameter settings, you can precisely control the coating quality and productivity. This helps you achieve an optimal balance between the sensitivity of the ARC treatment and the desired throughput. A variety of interfaces and the convenient TruControl Power operating program also enable effective configuration and diagnostics.

Superior ARC management

High reaction speeds and correspondingly reduced residual energy ensure stable processes and the highest possible sputter rates. Arc formation and thermal stress on the targets is reliably detected and prevented by the generator – the result is absolutely homogeneous coatings across the entire substrate surface. The fast and reliable arc management also enables trouble-free operation of the generator in the voltage-controlled transition range (transition mode).

A comprehensive range of options is available for the TruPlasma MF Series 7000 (G2) to help you adjust your MF generator to meet the requirements of your application.

Extended frequency range

The MF generators with power up to 100 kW are available as an option with an extended frequency range of 20 - 70 kHz (20 - 50 kHz is standard).

Auxiliary ignition

This reduces ARC formation and thermal stress. The ignition voltage and ramp time can be individually controlled.

Ultra-fast ARC management

The TruPlasma MF Series 7000 (G2) can be equipped with highly sensitive ARC management (UltraFastTreatment ≤ 1 mJ/kW; ≤ 10 mJ/kW is standard). Safety category 3 is required for UltraFastTreatment.

Equipped for every possibility

Profinet, Profibus, EtherCAT as well as analog and digital interfaces enable the simple integration of the TruPlasma MF Series 7000 into existing systems.

Switch cabinet door

The switch cabinet door is available with a particularly wide opening of 180 degrees as an option (130 degrees is standard).

Active switch cabinet dehumidification

For environments with very high humidity, the generator switch cabinet can be equipped with an active dehumidification unit. Cooling water control is required to operate the unit.

TruControl Power

The user-friendly, multilingual TruControl Power software offers you versatile options for operation, configuration and diagnostics.

By selecting suitable system components, you can optimally adjust your TruPlasma MF Series 7000 (G2) to your system environment.

MF power cables

You receive optimised TRUMPF Hüttinger MF power cables with your TruPlasma MF Series 7000 (G2). The cables guarantee optimal system performance at all times.

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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