We use cookies for this website. If you continue to use this website without changing the settings for cookies, we assume that you agree to the use of cookies.
Bias generator with stable voltage and fast arc management
Bias generator with stable voltage and fast arc management
Plasma excitation
TRUMPF Hüttinger

TruPlasma Bias Series 4000

Stable and multi-functional

    - / -
    • Overview
    • Applications
    • Technical Data
    • Customer benefits
    • Software
    • More Less
    Universal generators for your sputtering process

    The TruPlasma Bias Series 4000 is a state-of-the-art family of pulsed DC bias generators. They offer pulse frequencies of up 100 kHz and continuous bias output. In particular, the generators support the optical and metallic coating applications used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.

    High and low-voltage mode

    1200 V for substrate etching processes,
    300 V for bias-supported coating processes.

    Fast arc management

    As a result, there is significantly less droplet deposition and substrate damage.

    Stable and reproducible process results

    Excellent arc management due to state-of-the-art DSP technology and FPGA signal processing.

    Typical area of application of the TruPlasma Bipolar Series 4000 (G2): Manufacture of wear-resistant layers

    Manufacture of wear-resistant layers

    Generators in the TruPlasma Bias Series 4000 ensure that the plasma process is stable and the coating quality is optimal.

    Perfectly suited for the coating of large areas

    Coating of large areas

    Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Bias Series 4000 offer all of the requirements for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.

    TruPlasma Bias Series 4000 generator

    Photovoltaic cell production

    The generators of the TruPlasma Bias Series 4000 prove themselves in all critical PVD and PECVD processes and offer all of the requirements for a power supply that is stable and optimally adapted to the respective process, ensuring excellent, reproducible results.

    TruPlasma Bias 4012
    TruPlasma Bias 4018
    TruPlasma Bias 4026
    Output      
    Rated output 12 kW 18 kW 26 kW
    Maximum output current 40 A eff 60 A eff 87 A eff
    Maximum output voltage 1200 V eff 1200 V eff 1200 V eff
    Nominal operating frequency 0 kHz - 100 kHz 0 kHz - 100 kHz 0 kHz - 100 kHz
    Arc parameter      
    Maximum arc rate 50 1/s 50 1/s 50 1/s
    Arc treatment time <0.5 µs <0.5 µs <0.5 µs
    Network connection data      
    Line voltage 3x 360 V - 440 V 3x 360 V - 440 V 3x 360 V - 440 V
    Line frequency 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz
    Communication interfaces      
    Analog/digital Yes Yes Yes
    RS 232 / RS 485 - Yes -
    PROFIBUS Yes - Yes
    EtherCAT No No No
    Housing      
    Weight 70 kg 70 kg 71 kg
    IP protection class IP 20 IP 20 IP 20
    Cooling requirements      
    Coolant Air Air Air
    Coolant temperature 5 °C - 35 °C 5 °C - 35 °C 5 °C - 35 °C
    General      
    Overall efficiency 90 % 90 % 90 %
    Certificates / standards CE CE CE
    Ambient conditions      
    Outside temperature 5 °C - 35 °C 5 °C - 35 °C 5 °C - 35 °C
    Humidity 5 % - 85 % 5 % - 85 % 5 % - 85 %
    Barometric pressure 860 kPa - 1060 kPa 860 kPa - 1060 kPa 860 kPa - 1060 kPa
    PDF <1MB
    Technical data sheet

    The technical data of all product versions as a download.

    Architectural glass

    Ensures that process conditions remain consistently good

    The special power and control design ensures sound voltage stability, which is crucial for coating quality and a stable process. Designed using DSP technology and equipped with FPGA signal processing, the TruPlasma Bias Series 4000 has modern arc management, which offers a unique degree of accuracy and repetition accuracy. The impressive values of both parameters ensure optimal process stabilization.

    Hard material coating

    Simplified system handling with a single device for multiple processes

    The TruPlasma Bias Series 4000 has two separate voltage modes: a high-voltage mode with up to 1200 volts and a low-voltage mode with up to 300 volts. In particular, the modes support optical and metallic coating applications that are used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.

    Arc management

    Seamless processes result in optimal coating quality

    The generators in the TruPlasma Bias Series 4000 have completely digital arc management with very low arc energy and CompensateLine, thus enabling high coating quality and deposit rates. This means there is less droplet deposition and substrate damage, improving both the process and the product.

    User-friendly software PVD Power

    PVD Power

    The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

    You may also find these topics interesting

    Services_Electronics_Technical_Support
    Service like no other

    With a tailored service agreement, you can achieve the highest generator availability, while retaining clear maintenance and operating costs.

    Bias Generator mit stabilem Spannungs- und schnellem Arc-Management
    Optimized pulsed processes

    The TruPlasma Bias Series 3000 generators with their two operating modes and completely digital arc management enable a high coating quality and high deposition rates.

    Services_Electronics_Training
    Individualized customer training is our strong point

    Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

    Contact

    Klaus Nock
    Plasma Sales
    Fax +49 761 89711150
    E-mail

    Downloads

    Brochure
    TruPlasma Bias Series 3000 / 4000 brochure
    TruPlasma Bias Series 3000 / 4000 brochure
    pdf - 1 MB
    Service & contact