We use cookies for this website. If you continue to use this website without changing the settings for cookies, we assume that you agree to the use of cookies.
TruPlasma DC Series 4000 pulsed generator
TruPlasma DC Series 4000 pulsed generator
Plasma excitation
TRUMPF Hüttinger

TruPlasma DC Series 4000

Crystal clear: pulsed processes for perfect surfaces

    - / -
    • Overview
    • Applications
    • Customer benefits
    • Software
    • More Less
    The first choice for challenging plasma processes

    TruPlasma DC Series 4000 generators are the first choice for demanding plasma processes. They provide full power over a broad load adjustment range. They are, therefore, well-suited for high-tech sputtering applications as well as additional standard or pulsed DC plasma applications. Like non-pulsed generators, they have excellent arc management.

    Stable processes for consistent results

    Arc-related time losses are minimized due to state-of-the-art DSP control technology.

    Excellent arc management

    Improved results due to less droplet deposition and substrate damage.

    One generator for numerous processes

    Broad power range and pulse frequencies up to 100 kHz make it very flexible.

    TruPlasma DC Series 4000 pulsed generator

    Reactive sputtering of heavy materials

    TruPlasma DC Series 4000 pulsed generators have been specially developed for the reactive sputtering of heavy materials. The generators prove themselves in all critical PVD and PECVD processes, such as the production of photovoltaic cells and semiconductors as well as hard material coatings.

    Perfect for the coating of metal workpieces

    Demanding plasma processes

    TruPlasma DC Series 4000 generators are the first choice for demanding plasma processes. They provide full power over a broad load adjustment range. They are, therefore, well-suited for high-tech sputtering applications as well as additional standard or pulsed DC plasma applications. Like non-pulsed generators, they have excellent arc management.

    Arc management

    High efficiency

    Completely digital arc management with very low arc energy ensures high coating quality and deposition rates. As a result, there is even less droplet deposition and substrate damage. Together with the very low residual arc energy this directly improves the process and end product. High productivity is ensured through stable and constant process times with very limited process interruptions.

    TruPlasma DC Series 4000 pulsed generator

    User-friendly process adjustment

    TruPlasma DC Series 4000 generators have synchronized arc management, pulse frequency, and phase shifting. The frequency and pulse parameters can be adjusted, meaning a number of different processes can be operated with a single device. It is also possible to pulse synchronously with several TruPlasma DC 4000 generators.

    User-friendly software PVD Power

    PVD power

    The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

    You may also find these topics interesting

    TruPlasma DC 4040 (G2)
    Ideal for critical PVD and PECVD processes

    The TruPlasma DC Series 4000 (G2) from TRUMPF Hüttinger can be used in both pulsed and bias mode – two devices in one housing!

    Services_Electronics_Technical_Support
    Service like no other

    With a tailored service agreement, you can achieve the highest generator availability, while retaining clear maintenance and operating costs.

    Services_Electronics_Training
    Individualized customer training is our strong point

    Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

    Contact

    Klaus Nock
    Plasma Sales
    Fax +49 761 89711150
    E-mail

    Downloads

    TruPlasma DC Series 4000 flyer
    TruPlasma DC Series 4000 flyer
    pdf - 243 KB
    Service & contact