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TruPlasma Bipolar 4040 bipolar generator
TruPlasma Bipolar 4040 bipolar generator
Plasma excitation
TRUMPF Hüttinger

TruPlasma Bipolar Series 4000 (G2)

Maximum power on a flexible wave

Bipolar technology for the most demanding requirements

The process power supplies from the TruPlasma Bipolar Series 4000 (G2) were specially developed for plasma-based coating by means of physical vapor deposition (PVD), plasma-enhanced chemical vapor deposition (PECVD), and reactive sputtering processes. As a result of their configurable output signal and sophisticated ARC management, these latest generation, bipolar pulsers are extremely versatile. Regardless of whether the application is semi-conductor and solar cell manufacturing, or coating architectural glazing, you can always expect maximum performance in terms of coating quality and rates.

Extremely low ARC energy

Fully digital arc management for the highest coating quality and productivity.

Configurable wave forms

Simple adjustment to various processes by varying the output signal.

One generator, numerous applications

DC, pulsed DC and bipolar: Save on costs due to diverse settings.

Integrated water cooling

No external components are required, meaning it only requires a small amount of space.

Typical area of application of the TruPlasma Bipolar Series 4000 (G2): Manufacture of wear-resistant layers

First-rate power supply

Typical areas of application include semi-conductor and photovoltaics production, coating architectural glazing, and manufacturing decorative and wear-resistant coatings of the highest quality. PVD and PECVD processes, in particular, are used for this.

Output          
Rated output 10 kW 20 kW 30 kW 40 kW 60 kW
Maximum output current 25 A eff 50 A eff 75 A eff 100 A eff 150 A eff
Maximum output voltage 1000 V eff 1000 V eff 1000 V eff 1000 V eff 1000 V eff
Nominal operating frequency 20 kHz - 80 kHz 20 kHz - 80 kHz 20 kHz - 80 kHz 20 kHz - 80 kHz 20 kHz - 80 kHz
Arc parameter          
Maximum arc rate 20000 1/s 20000 1/s 20000 1/s 20000 1/s 20000 1/s
Arc energy 0.3 mJ/kW 0.3 mJ/kW 0.3 mJ/kW 0.3 mJ/kW 0.3 mJ/kW
Ignition voltage          
with auxiliary ignition 2000 V 2000 V 2000 V 2000 V 2000 V
Network connection data          
Line voltage 380 480 V 380 480 V 380 480 V 380 480 V 380 480 V
Line frequency 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz
Power factor 0.95 0.95 0.95 0.95 0.95
Communication interfaces          
Analog/digital Yes Yes Yes Yes Yes
RS 232 / RS 485 Yes Yes Yes Yes Yes
PROFIBUS Yes Yes Yes Yes Yes
EtherCAT Yes Yes Yes
-
Yes Yes
DeviceNet Yes Yes Yes
-
Yes Yes
Housing          
Width 482 mm 482 mm 482 mm 482 mm 482 mm
Height 178 mm 266 mm 355 mm 355 mm 622 mm
Depth 683 mm 683 mm 683 mm 683 mm 683 mm
Weight 60 kg 60 kg 100 kg 100 kg 160 kg
IP protection class IP40 IP40 IP40 IP40 IP40
Cooling requirements          
Coolant Water Water Water Water Water
Max. water pressure 7 bar 7 bar 7 bar 7 bar 7 bar
Min. pressure differential 3 bar 3 bar 3 bar 3 bar 3 bar
Min. flow rate 4 l/min 8 l/min 8 l/min 12 l/min 12 l/min
Coolant temperature 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C
General          
Overall efficiency 90 % 90 % 90 % 90 % 90 %
Ambient conditions          
Outside temperature 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C 5 °C - 45 °C
Humidity 5 % - 85 % 5 % - 85 % 5 % - 85 % 5 % - 85 % 5 % - 85 %
Barometric pressure 86 kPa - 106 kPa 86 kPa - 106 kPa 86 kPa - 106 kPa 86 kPa - 106 kPa 86 kPa - 106 kPa
PDF <1MB
Technical data sheet

The technical data of all product versions as a download.

Arc management

Perfect coatings, high productivity

Completely digital arc management with very low arc energy ensures high coating quality and deposition rates. Even in demanding reactive processes, the TruPlasma Bipolar Series 4000 (G2) always guarantees a uniform process power supply and thus a stable plasma condition.

Multiple applications due to flexible selection of the output signal

More flexibility, lower costs

Adjustable wave forms mean that you can very easily adjust the TruPlasma Bipolar Series 4000 (G2) generators to suit a variety of process requirements. With the flexible selection of the output signal (DC, pulsed DC or bipolar), they can be used with versatility, thereby helping to reduce your total cost of ownership (TCO).

TruPlasma Bipolar 4060 bipolar generator

Everything in a single housing

No external components are needed due to the water cooling which is fully integrated in the environmentally-protected generator housing.

User-friendly software PVD Power

PVD Power

The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction. Display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

By selecting from a variety of system components, you can optimally adjust your bipolar pulse generator to your system environment.

Rear view of a generator from the TruPlasma Bipolar Series 4000 (G2)
Mains cable

Various cable and connector designs are available for different connection standards.

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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Contact

Klaus Nock
Plasma Sales
Fax +49 761 89711150
E-mail

Downloads

Brochure
TruPlasma Bipolar Series 4000 (G2) brochure
TruPlasma Bipolar Series 4000 (G2) brochure
pdf - 1 MB
Service & contact