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Reactive Sputtering

Producing Oxides and Nitrides Economically

Solarzellenherstellung

Titanium, silver, zinc, aluminum or silicon targets can be sputtered in a reactive sputtering process just as in passive sputtering. However, the atoms that form the film on the substrate come from both the target material and the gaseous stage.

Titanium, silver, zinc, aluminum or silicon targets can be sputtered in a reactive sputtering process just as in passive sputtering. However, the atoms that form the film on the substrate come from both the target material and the gaseous stage.

Contact

Klaus Nock
Plasma Sales
Fax: +49 761 89711150
E-mail

Klaus Nock
Plasma Sales
Fax: +49 761 89711150
E-mail
Service & contact