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Bias generator with stable voltage and fast arc management
Bias generator with stable voltage and fast arc management
Plasma excitation
TRUMPF Hüttinger

TruPlasma Bias Series 3000

Stable and multi-functional

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    • Overview
    • Applications
    • Customer benefits
    • Software
    • More Less
    Universal generators for your sputtering process

    In particular, the TruPlasma Bias Series 3000 generators support the optical and metallic coating applications used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.

    High and low-voltage mode

    1200 V for substrate etching processes,
    300 V for bias-supported coating processes.

    Fast arc management

    Very low residual arc energy, resulting in less substrate damage and more stable processes.

    Stable and reproducible process results

    Unique precision due to state-of-the-art DSP technology and FPGA signal processing.

    Perfectly suited for the coating of large areas

    Decorative coating

    Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Bias Series 3000 offer all of the requirements for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.

    Perfectly suited to etching and coating processes

    Semi-conductor technology

    The generators of the TruPlasma Bias Series 3000 prove themselves in all critical PVD and PECVD processes and offer all of the requirements for a power supply that is stable and optimally adapted to the respective process, ensuring excellent, reproducible results.

    TruPlasma Bias Series 3000 generators in use

    Ensures that process conditions remain consistently good

    The special power and control design ensures sound voltage stability, which is crucial for coating quality and a stable process. Designed using DSP technology and equipped with FPGA signal processing, the TruPlasma Bias Series 3000 has modern arc management, which offers a unique degree of accuracy and repetition accuracy. The impressive values of both parameters ensure optimal process stabilization.

    Typical area of application of the TruPlasma Bipolar Series 4000 (G2): Manufacture of wear-resistant layers

    Simplified system handling with a single device for multiple processes

    The TruPlasma Bias Series 3000 has two separate voltage modes: a high-voltage mode with up to 1,200 volts and a low-voltage mode with up to 300 volts. In particular, the modes support optical and metallic coating applications that are used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.

    Typical area of application of the TruPlasma Bias Series 3000: Photovoltaic cell production

    Optimal coating quality due to seamless processes

    The generators in the TruPlasma Bias Series 3000 have completely digital arc management with very low arc energy and CompensateLine, thus enabling high coating quality and deposit rates. This means there is less substrate damage, improving both the process and the end product.

    User-friendly software PVD Power

    PVD Power

    The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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    In particular, the TruPlasma Bias Series 4000 generators support the optical and metallic coating applications used in semiconductor technology, for example.

    Services_Electronics_Technical_Support
    Service like no other

    With a tailored service agreement, you can achieve the highest generator availability, while retaining clear maintenance and operating costs.

    Services_Electronics_Training
    Individualized customer training is our strong point

    Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

    Contact

    Klaus Nock
    Plasma Sales
    Fax: +49 761 89711150
    E-mail

    Downloads

    Brochure
    TruPlasma Bias Series 3000 / 4000 brochure
    TruPlasma Bias Series 3000 / 4000 brochure
    pdf - 1 MB
    Service & contact