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TruPlasma DC 3040 direct current generator
TruPlasma DC 3040 direct current generator
Plasma excitation
TRUMPF Hüttinger

TruPlasma DC Series 3000 (G2)

Perfection for all surfaces

The latest generation of compact DC generators

The TruPlasma DC Series 3000 (G2) is suitable for a number of DC sputtering processes – including use as a replacement for pulsed process power supplies. This is because progressive arc management offers a guarantee for the best layer qualities and a significantly higher production yield. Because of its extremely compact design you can integrate the water-cooled DC generators very easily into your current application.

Lowest arc energy in its class

Residual energies of < 0.3 mJ/kW guarantee the best layer qualities and high deposition rates.

High power density

Very compact design (19-inch plug-in unit) results in simple integration, even for larger power levels.

Wide power range

Output power of 20 kW to 300 kW, so use as a replacement for larger generators is also possible.

Complete water cooling

Enables long system runtimes and reduces maintenance.

Simple system integration

Variable line voltage (400 V to 480 V) and different data interfaces.

Hard material coating

Hard material coating

The application of functional coatings using DC magnetron sputtering provides workpieces that undergo a lot of use with increased surface hardness and static friction, as well as better thermal and chemical stability. TruPlasma DC Series 3000 (G2) direct current generators ensure that the plasma process is stable and thus that the coating quality is optimal.

TruPlasma DC 3040 direct current generator

Metallization

A PVD process is used to apply a paper-thin metal layer to various materials in order to provide them with the best possible optical and electrical properties. A power supply that has been optimally adapted to the process parameters enables the deposit of absolutely homogeneous, defect-free layers.

Photovoltaic cell production

Photovoltaic cell production

In order to influence the electrical properties, photovoltaic cells, as well as flat screens and touchscreens, are coated with electrically conductive materials (TCO). As a result of their very low residual arc energy, TruPlasma DC Series 3000 (G2) direct current generators are ideally suited for this.

TruPlasma DC 3040 direct current generator

Architectural glass

The large area coating of architectural glass in a direct current sputtering process places particularly high demands on the process power supply. TruPlasma DC Series 3000 (G2) direct current generators offer the ideal conditions for high-quality coating results.

- / -
Output              
Rated output 20 kW 30 kW 40 kW 60 W - - -
Maximum output current 50 A eff 75 A eff 100 A eff 150 A eff - - -
Maximum output voltage 1000 V eff 1000 V eff 1000 V eff 1000 V eff - - -
Arc parameter              
Maximum arc rate 8000 1/s 8000 1/s 8000 1/s 8000 1/s - - -
Arc energy <0.3 mJ/kW <0.3 mJ/kW <0.3 mJ/kW <0.3 mJ/kW - - -
Arc treatment time <0.1 µs <0.1 µs <0.1 µs <0.1 µs - - -
Ignition voltage              
with auxiliary ignition 1500 V 1500 V 1500 V 1500 V - - -
without auxiliary ignition 1000 V 1000 V 1000 V 1000 V - - -
Network connection data              
Line voltage (±10%) 360 V - 528 V 3x 360 V - 528 V 3x 360 V - 528 V 3x 360 V - 528 V - - -
Line frequency 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz - - -
Communication interfaces              
Analog/digital Yes Yes Yes - - - -
RS 232 / RS 485 Yes Yes Yes - - - -
PROFIBUS Yes Yes Yes - - - -
EtherCAT Yes Yes Yes - - - -
DeviceNet Yes Yes Yes - - - -
Housing              
Weight 45 kg 65 kg 65 kg - - - -
IP protection class 40 40 40 - - - -
Cooling requirements              
Coolant Water Water Water - - - -
Max. water pressure 7 bar 7 bar 7 bar - - - -
Min. pressure differential 1.5 bar 1.5 bar 1.5 bar - - - -
Min. flow rate 4 l/min 8 l/min 8 l/min - - - -
Coolant temperature 20 °C - 35 °C 20 °C - 35 °C 20 °C - 35 °C - - - -
DC connection data              
Number of the terminals 3 3 3 - - - -
Nominal current / terminal 35 A 53 A 53 A - - - -
General              
Overall efficiency 90 % 90 % 90 % - - - -
Certificates / standards CE CE CE - - - -
Ambient conditions              
Outside temperature 5 °C 5 °C - 45 °C 5 °C - 45 °C - - - -
Humidity 5 % - 85 % 5 % - 85 % 5 % - 85 % - - - -
Barometric pressure 860 kPa - 1060 kPa 860 kPa - 1060 kPa 860 kPa - 1060 kPa - - - -
PDF <1MB
Technical data sheet

The technical data of all product versions as a download.

Arc management

Low-cost alternative to pulsed generators

With their state-of-the-art arc management, TruPlasma DC Series 3000 (G2) direct current generators prove themselves in many sputtering processes. As a low-cost alternative to pulsed DC generators they also offer a significantly higher production yield.

The TruPlasma VHF Series 3000 generators offer unparalleled cost-effectiveness

Compact alternative for higher output

Despite their very compact design, the TruPlasma Series 3000 (G2) direct current generators beat even larger generators in terms of coating quality and productivity. They thus represent a compact and easily integrated alternative, even for a high output power of more than 60 kW.

DC generator with complete water cooling

Water cooling for longer system runtimes

TruPlasma DC Series 3000 (G2) direct current generators have their own complete water cooling system. Compared to air cooled devices, these systems enable a higher system runtime, reduce maintenance costs, and prevent contamination as a result of dust particles.

Various options enable optimal adjustment of the direct current generator to your application.

Parallel operation and synchronization

Several DC generators in the TruPlasma DC Series 3000 (G2) can be operated simultaneously. This mode enables the synchronization of the arc recognition of several generators geared toward different targets. The pulse mode can be synchronized as well. If high output power is required, a parallel circuit of up to 5 TruPlasma DC 3030 generators is possible. This functions as a TruPlasma DC 3150 unit.

Water valve control

Water valve control regulates the cooling water flow to avoid condensation and simultaneously protect the generator against overheating.

Equipped for every possibility

EtherCAT and EtherNET/IP interfaces enable simple integration of the TruPlasma DC Series 3000 (G2) in current systems.

User-friendly software PVD Power

PVD Power

The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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Perfect homogeneous coatings

As a result of their fast arc management and low residual energy, TruPlasma DC Series 3000 generators are the right choice for coatings using DC sputtering.

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Individualized customer training is our strong point

Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

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Service like no other

With a tailored service agreement, you can achieve the highest generator availability, while retaining clear maintenance and operating costs.

Contact

Klaus Nock
Plasma Sales
Fax +49 761 89711150
E-mail

Downloads

TruPlasma DC Series 3000 (G2) brochure
TruPlasma DC Series 3000 (G2) brochure
pdf - 1 MB
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