RF Plasma Excitation
TruPlasma radio frequency generators from TRUMPF Hüttinger provide the highest process stability of all power supplies for plasma excitation. The RF technology is therefore especially suited to processes which need the highest level of precision and reproducibility. Also in terms of energy efficiency and robustness, our RF generators are amongst the leaders on the market – they are therefore the first choice for demanding applications such as the manufacture of semi-conductor elements, microchips, solar cells or flat screens.
TruPlasma RF Series 1000 / 3000 (G2/13)
The TruPlasma RF Series 1000 / 3000 (G2/13) are the latest generation of RF generators. Due to innovative functions such as the patented CombineLine coupling technology or real-time measurement of all process parameters, reliable power supply even in demanding plasma processes is guaranteed – the optimal conditions for reproducible results and high productivity.
TruPlasma RF Series 3000
The powerful RF generators of the TruPlasma RF Series 3000 are characterized by the highest efficiency and process stability. They are therefore, perfectly suited for demanding plasma processes such as those used during the production of semi-conductors, photovoltaic cells, or flat screens. Matchboxes for impedance matching that are perfectly adapted to the generator ensure the optimal and stable power transfer from the generator to the plasma at all times.
TruPlasma VHF Series 3000
The highest power for your process: The generators of the TruPlasma VHF series 3000 are based on an innovative platform concept which meets even the toughest process demands. The modular design of the VHF generators, which are purely cooled by water, enables the output power to be scaled by up to 80 kW – and this with the smallest footprint!
TruPlasma Match Series 1000 (G2/13)
The exact matching of the output impedance of the RF generator is decisive for an optimal plasma process. This is achieved by the matchboxes of the TruPlasma Match Series 1000 (G2/13) as a link between the generator and the process. This results in a comprehensive solution for your process power supply – the TRUMPF RF system.