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Bias generator with stable voltage and fast arc management
Bias generator with stable voltage and fast arc management
Plasma excitation
TRUMPF Hüttinger

TruPlasma Bias Series 3000

Stable and multi-functional

Universal generators for your sputtering process

In particular, the TruPlasma Bias Series 3000 generators support the optical and metallic coating applications used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.

High and low-voltage mode

1200 V for substrate etching processes,
300 V for bias-supported coating processes.

Fast arc management

Very low residual arc energy, resulting in less substrate damage and more stable processes.

Stable and reproducible process results

Unique precision due to state-of-the-art DSP technology and FPGA signal processing.

Perfectly suited for the coating of large areas

Decorative coating

Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Bias Series 3000 offer all of the requirements for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.

Perfectly suited to etching and coating processes

Semi-conductor technology

The generators of the TruPlasma Bias Series 3000 prove themselves in all critical PVD and PECVD processes and offer all of the requirements for a power supply that is stable and optimally adapted to the respective process, ensuring excellent, reproducible results.

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TruPlasma Bias Series 3000 generators in use

Ensures that process conditions remain consistently good

The special power and control design ensures sound voltage stability, which is crucial for coating quality and a stable process. Designed using DSP technology and equipped with FPGA signal processing, the TruPlasma Bias Series 3000 has modern arc management, which offers a unique degree of accuracy and repetition accuracy. The impressive values of both parameters ensure optimal process stabilization.

Typical area of application of the TruPlasma Bipolar Series 4000 (G2): Manufacture of wear-resistant layers

Simplified system handling with a single device for multiple processes

The TruPlasma Bias Series 3000 has two separate voltage modes: a high-voltage mode with up to 1,200 volts and a low-voltage mode with up to 300 volts. In particular, the modes support optical and metallic coating applications that are used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.

Typical area of application of the TruPlasma Bias Series 3000: Photovoltaic cell production

Optimal coating quality due to seamless processes

The generators in the TruPlasma Bias Series 3000 have completely digital arc management with very low arc energy and CompensateLine, thus enabling high coating quality and deposit rates. This means there is less substrate damage, improving both the process and the end product.

User-friendly software PVD Power

PVD Power

The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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