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Generator in the TruPlasma Highpulse Series 4000
Generator in the TruPlasma Highpulse Series 4000
Plasma excitation
TRUMPF Hüttinger

TruPlasma Highpulse Series 4000

High-density plasma for superior coating results

The first choice for HiPIMS applications

The generators in the TruPlasma Highpulse Series 4000 can be used as an alternative to DC sputter generators in current magnetron systems without any modifications.

Excellent coating properties

Impulses of up to 8 MW create an extremely dense plasma for optimum coating results.

Flawless coating and adhesion

Excellent process results for high-power impulse magnetron sputtering (HIPIMS).

Different power classes

Pulse power from 1 MW to 8 MW, average power from 10 kW to 20 kW.

Generators in the TruPlasma Highpulse Series 4000 in action

HIPIMS applications

The generators in the TruPlasma Highpulse Series 4000 are the first choice for HIPIMS applications. As the latest development in pulsed PVD sputtering processes, HIPIMS provides particularly corrosion-resistant and wear-resistant hard material coating.

Perfectly suited to etching and coating processes

Etching, pre-treatment of surfaces and trench filling

Peak performance of 8 megawatts creates extreme plasma densities with high ion fluxes. Generally comparable with an arc discharge, the difference with HIPIMS technology is that there are no material droplets. In combination with polarized substrates, the TruPlasma Highpulse Series 4000 can also operate semi-conductor applications, such as etching, pre-treatment of surfaces, and trench filling.

Ideal for large area coating

Ideal for large area coating

Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Highpulse Series 4000 offer all of the conditions for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.

Area of application of the TruPlasma Highpulse Series 4000: demanding processes in the solar industry

Photovoltaic cell production

There are numerous areas of application for tailored process energy in the photovoltaic field. The generators in the TruPlasma Highpulse Series 4000 can be adapted optimally to the respective process and enable excellent coating parameters and high productivity.

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Generators in the TruPlasma Highpulse Series 4000 in action

Optimal process results

The generators in the TruPlasma Highpulse Series 4000 offer unparalleled flexibility for research and industry processes and enable droplet-free sputtering and minimal surface defects. Completely digital arc management with very low arc energy based on real time current metering enables high coating qualities and deposition rates.

Enable optimal device integration: The generators of the TruPlasma Highpulse Series 4000

Can be used with flexibility

The generators in the TruPlasma Highpulse Series 4000 can easily be adjusted to current cathode systems and process requirements, and enable optimal device integration.

Various options ensure optimal adjustment of the TruPlasma Highpulse Series 4000 to your application.

Arc management CompensateLine (CLC)

Completely digital arc management with very low arc energy ensures high coating quality and deposition rates.

Graphical operating software PVD Power

PVD Power

The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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Contact

Klaus Nock
Plasma Sales
Fax +49 761 89711150
E-mail

Downloads

TruPlasma Highpulse Series 4000 brochure
TruPlasma Highpulse Series 4000 brochure
pdf - 517 KB
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