Effortless handling of difficult processes
The TruPlasma DC Series 4000 (G2) was specially developed for reactive DC sputtering with heavy materials. The generators, which work with pulsed direct current, are particularly well proven in critical PVD and PECVD processes, which require both the highest coating quality and productivity. The compact DC process power supplies can be used in both pulsed and bias mode – two devices in one housing!
Digital signal processing guarantees stable processes and minimal arc-related time losses.
Fast arc handling combined with DC pulse technology minimizes substrate damage.
Due to a broad frequency spectrum and adjustable reverse voltage.
The integrated chiller saves space and reduces maintenance outlay.
Hard material coating
The addition of functional coats gives heavy-duty workpieces increased surface hardness and static friction as well as better thermal and chemical stability. The pulsed generators of the TruPlasma DC Series 4000 (G2) ensure a stable plasma process and thus optimal coating quality.
Metallization
Paper-thin metal layers can be added to various materials using a PVD process to provide them with optimal optical and electrical properties. A power supply that has been optimally adapted to the process parameters enables the deposit of absolutely homogeneous, defect-free layers.
Photovoltaic cell production
In order to influence their electrical properties, photovoltaic cells, flat screens and touchscreens are coated with electrically conductive materials (TCO). As a result of their very low arc energy, the pulsed generators of the TruPlasma DC Series 4000 (G2) are ideally suited for this application.
Architectural glass
The large-scale coating of architectural glass during a PVD plasma process places particularly high requirements on the process power supply. The pulsed generators of the TruPlasma DC Series 4000 (G2) offer the ideal conditions for a high-quality coating result.
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TruPlasma DC 4010 (G2)
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TruPlasma DC 4020 (G2)
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TruPlasma DC 4040 (G2)
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|---|---|---|---|
| Output | |||
| Rated output | 10 kW | 20 kW | 40 kW |
| Maximum output current | 33 A eff | 67 A eff | 133 A eff |
| Maximum output voltage | 1200 V eff | 1200 V eff | 1200 V eff |
| Nominal operating frequency | 0 kHz - 100 kHz | 0 kHz - 100 kHz | 0 kHz - 100 kHz |
| Arc parameter | |||
| Maximum arc rate | 20000 1/s | 20000 1/s | 20000 1/s |
| Arc energy | <0.3 mJ/kW | <0.3 mJ/kW | <0.3 mJ/kW |
| Arc treatment time | <0.1 µs | <0.1 µs | <0.1 µs |
| Ignition voltage | |||
| with auxiliary ignition | 1750 V | 1750 V | 1750 V |
| without auxiliary ignition | 1250 V | 1250 V | 1250 V |
| Network connection data | |||
| Line voltage | 3x 360 V - 528 V | 3x 360 V - 528 V | 3x 360 V - 528 V |
| Line frequency | 50 Hz - 60 Hz | 50 Hz - 60 Hz | 50 Hz - 60 Hz |
| Communication interfaces | |||
| Analog/digital | Yes | Yes | Yes |
| RS 232 / RS 485 | Yes | Yes | Yes |
| PROFIBUS | Yes | Yes | Yes |
| EtherCAT | No | No | No |
| DeviceNet | Yes | Yes | Yes |
| Housing | |||
| Weight | 65 kg | 75 kg | 150 kg |
| IP protection class | 40 | 40 | 40 |
| Cooling requirements | |||
| Coolant | Water | Water | Water |
| Max. water pressure | 7 bar | 7 bar | 7 bar |
| Min. pressure differential | 3 bar | 3 bar | 3 bar |
| Min. flow rate | 8 l/min | 8 l/min | 16 l/min |
| Coolant temperature | 20 °C - 35 °C | 20 °C - 35 °C | 20 °C - 35 °C |
| DC connection data | |||
| Number of the terminals | 3 | 3 | 3 |
| Nominal current / terminal | 25 A | 45 A | 85 A |
| General | |||
| Overall efficiency | 90 % | 90 % | 90 % |
| Certificates / standards | CE | CE | CE |
| Ambient conditions | |||
| Outside temperature | 5 °C - 45 °C | 5 °C - 45 °C | 5 °C - 45 °C |
| Humidity | 5 % - 85 % | 5 % - 85 % | 5 % - 85 % |
| Barometric pressure | 86 kPa - 106 kPa | 86 kPa - 106 kPa | 86 kPa - 106 kPa |
The technical data of all product versions as a download.
High coating quality and productivity
The combination of fast arc handling and DC pulse technology results in a lower droplet rate and fewer surface defects. Arc-related process interruptions are minimized and the deposition rate is increased significantly.
Flexible adaptation to the process
The pulse frequency can be adjusted within a wide range; it is also possible to operate the DC generator in bias mode. This means you can use the same device for a number of applications. Sophisticated monitoring tools support you in the optimization of your process.
Various options enable optimal adjustment of the pulsed DC generator to your application.
Several DC generators in the TruPlasma DC Series 4000 (G2) can be operated simultaneously. This mode enables the synchronization of the arc recognition of several generators geared toward different targets. The pulse mode can be synchronized as well.
PVD Power
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
