
RF Plasma Excitation
TruPlasma radio frequency generators from TRUMPF Hüttinger provide the highest process stability of all power supplies for plasma excitation. The RF technology is therefore especially suited to processes which need the highest level of precision and reproducibility. Also in terms of energy efficiency and robustness, our RF generators are amongst the leaders on the market – they are therefore the first choice for demanding applications such as the manufacture of semi-conductor elements, microchips, solar cells or flat screens.