RF Plasma Excitation

The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 watts of high-precision, reproducible RF energy with an extremely fine resolution – in increments of 100 mW – and is thus suitable for diverse plasma applications. Whether manufacturing semi-conductors, solar cells, or displays – the patented TRUMPF Hüttinger Technology guarantees top availability and the best process results throughout due to modern process functions.

The TruPlasma RF Series 1000 / 3000 (G2/13) are the latest generation of RF generators. Due to innovative functions such as the patented CombineLine coupling technology or real-time measurement of all process parameters, reliable power supply even in demanding plasma processes is guaranteed – the optimal conditions for reproducible results and high productivity.

The powerful RF generators of the TruPlasma RF Series 3000 are characterized by the highest efficiency and process stability. They are therefore, perfectly suited for demanding plasma processes such as those used during the production of semi-conductors, photovoltaic cells, or flat screens. Matchboxes for impedance matching that are perfectly adapted to the generator ensure the optimal and stable power transfer from the generator to the plasma at all times.

The highest power for your process: The generators of the TruPlasma VHF series 3000 are based on an innovative platform concept which meets even the toughest process demands. The modular design of the VHF generators, which are purely cooled by water, enables the output power to be scaled by up to 80 kW – and this with the smallest footprint!

The exact matching of the output impedance of the RF generator is decisive for an optimal plasma process. This is achieved by the matchboxes of the TruPlasma Match Series 1000 (G2/13) as a link between the generator and the process. This results in a comprehensive solution for your process power supply – the TRUMPF RF system.