Universal generators for your sputtering process
In particular, the TruPlasma Bias Series 3000 generators support the optical and metallic coating applications used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.
1200 V for substrate etching processes,
300 V for bias-supported coating processes.
Very low residual arc energy, resulting in less substrate damage and more stable processes.
Unique precision due to state-of-the-art DSP technology and FPGA signal processing.
Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Bias Series 3000 offer all of the requirements for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.
The generators of the TruPlasma Bias Series 3000 prove themselves in all critical PVD and PECVD processes and offer all of the requirements for a power supply that is stable and optimally adapted to the respective process, ensuring excellent, reproducible results.
Ensures that process conditions remain consistently good
The special power and control design ensures sound voltage stability, which is crucial for coating quality and a stable process. Designed using DSP technology and equipped with FPGA signal processing, the TruPlasma Bias Series 3000 has modern arc management, which offers a unique degree of accuracy and repetition accuracy. The impressive values of both parameters ensure optimal process stabilization.
Simplified system handling with a single device for multiple processes
The TruPlasma Bias Series 3000 has two separate voltage modes: a high-voltage mode with up to 1,200 volts and a low-voltage mode with up to 300 volts. In particular, the modes support optical and metallic coating applications that are used in semiconductor technology or hard material coating, for example. They are also well-suited for applications with comparable voltage and current requirements.
Optimal coating quality due to seamless processes
The generators in the TruPlasma Bias Series 3000 have completely digital arc management with very low arc energy and CompensateLine, thus enabling high coating quality and deposit rates. This means there is less substrate damage, improving both the process and the end product.
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.