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Generator in the TruPlasma Highpulse Series 4000
Generator in the TruPlasma Highpulse Series 4000
Plasma excitation
TRUMPF Hüttinger

TruPlasma Highpulse Series 4000

High-density plasma for superior coating results

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    • Overview
    • Applications
    • Customer benefits
    • Options
    • Software
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    The first choice for HiPIMS applications

    The generators in the TruPlasma Highpulse Series 4000 can be used as an alternative to DC sputter generators in current magnetron systems without any modifications.

    Excellent coating properties

    Impulses of up to 8 MW create an extremely dense plasma for optimum coating results.

    Flawless coating and adhesion

    Excellent process results for high-power impulse magnetron sputtering (HIPIMS).

    Different power classes

    Pulse power from 1 MW to 8 MW, average power from 10 kW to 20 kW.

    Generators in the TruPlasma Highpulse Series 4000 in action

    HIPIMS applications

    The generators in the TruPlasma Highpulse Series 4000 are the first choice for HIPIMS applications. As the latest development in pulsed PVD sputtering processes, HIPIMS provides particularly corrosion-resistant and wear-resistant hard material coating.

    Perfectly suited to etching and coating processes

    Etching, pre-treatment of surfaces and trench filling

    Peak performance of 8 megawatts creates extreme plasma densities with high ion fluxes. Generally comparable with an arc discharge, the difference with HIPIMS technology is that there are no material droplets. In combination with polarized substrates, the TruPlasma Highpulse Series 4000 can also operate semi-conductor applications, such as etching, pre-treatment of surfaces, and trench filling.

    Ideal for large area coating

    Ideal for large area coating

    Large area coating places particularly high requirements on the power process supply in the plasma process. The generators in the TruPlasma Highpulse Series 4000 offer all of the conditions for a power supply that is stable and optimally adjusted to the respective process, ensuring excellent, reproducible results.

    Area of application of the TruPlasma Highpulse Series 4000: demanding processes in the solar industry

    Photovoltaic cell production

    There are numerous areas of application for tailored process energy in the photovoltaic field. The generators in the TruPlasma Highpulse Series 4000 can be adapted optimally to the respective process and enable excellent coating parameters and high productivity.

    Generators in the TruPlasma Highpulse Series 4000 in action

    Optimal process results

    The generators in the TruPlasma Highpulse Series 4000 offer unparalleled flexibility for research and industry processes and enable droplet-free sputtering and minimal surface defects. Completely digital arc management with very low arc energy based on real time current metering enables high coating qualities and deposition rates.

    Enable optimal device integration: The generators of the TruPlasma Highpulse Series 4000

    Can be used with flexibility

    The generators in the TruPlasma Highpulse Series 4000 can easily be adjusted to current cathode systems and process requirements, and enable optimal device integration.

    Various options ensure optimal adjustment of the TruPlasma Highpulse Series 4000 to your application.

    Arc management CompensateLine (CLC)

    Completely digital arc management with very low arc energy ensures high coating quality and deposition rates.

    Graphical operating software PVD Power

    PVD Power

    The user-friendly, multilingual PVD Power software offers you numerous operation, configuration, and diagnosis options for optimizing process quality and effective error correction: display actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualization of important operating parameters with high temporal resolution (oscilloscope function).

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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    Power supplies for your plasma process

    Plasma generators from TRUMPF Hüttinger have a broad power and frequency spectrum. Find out about our products here.

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    Individualized customer training is our strong point

    Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

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    TruPlasma Highpulse Series 4000 brochure
    TruPlasma Highpulse Series 4000 brochure
    pdf - 517 KB
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