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RF generator TruHeat HF 7010
RF generator TruHeat HF 7010
Induction
TRUMPF Hüttinger

TruHeat HF Series 7000

High performance generator with proven tube technology

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    • Overview
    • Applications
    • Technical Data
    • Customer benefits
    • Options
    • System components
    • More Less
    Reliable high power for demanding heating processes

    Even at high frequencies above 500 kHz, the TruHeat HF Series 7000 delivers constant and high power – ideal for uninterrupted long-term processes in the semi-conductor and photovoltaic industries, as well as for changing requirements in commercial heat treating. The TruHeat HF Series 7000 features generators you can rely on in any circumstance.

    Proven tube technology

    Guaranteed reliable process results even at frequencies above 500 kHz.

    High and stable power levels

    500 kW at frequencies up to 3000 kHz.

    Large power bandwidth

    Seven power units (10 kW to 500 kW) for a wide variety of induction applications.

    Wide frequency range

    400 kHz to 3000 kHz for optimal adjustment to the widest variety of heating processes.

    Floating zone process

    High level of long-term stability even for critical processes

    Floating zone (FZ) process for manufacturing high purity silicon.

    Inductively coupled plasma

    Diverse applications

    Inductively coupled plasma (ICP).

    Output                          
    Rated output 10 kW 30 kW 60 kW 100 kW 120 kW - - - - - - - -
    Maximum output voltage 5000 V eff 6300 V eff 6300 V eff 6600 V eff 7000 V eff - - - - - - - -
    Nominal operating frequency 400 kHz - 3000 kHz 400 kHz - 3000 kHz 400 kHz - 3000 kHz 400 kHz - 3000 kHz 400 kHz - 3000 kHz - - - - - - - -
    Length, power cable 3 m - 20 m 3 m - 20 m 3 m - 20 m 3 m - 4 m 3 m - 4 m - - - - - - - -
    Network connection data                          
    Line voltage (±10%) 200 V - 480 V (±10%) 200 V - 480 V (±10%) 200 V - 480 V (±10%) 200 V - 480 V (±10%) 200 V - 480 V - - - - - - - -
    Line frequency 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz 50 Hz - 60 Hz - - - - - - - -
    Network input power 21 kVA 63 kVA 126 kVA 210 kVA 252 kVA - - - - - - - -
    Housing                          
    Weight 900 kg 1200 kg 1200 kg 1500 kg 1500 kg - - - - - - - -
    IP protection class IP54 IP54 IP54 IP54 IP54 - - - - - - - -
    Cooling requirements                          
    Max. water pressure 6 bar 6 bar 6 bar 6 bar 6 bar - - - - - - - -
    Min. pressure differential 3.5 bar 3.5 bar 3.5 bar 3.5 bar 3.5 bar - - - - - - - -
    Min. flow rate 10 l/min 30 l/min 60 l/min 100 l/min 120 l/min - - - - - - - -
    Coolant temperature - 35 °C - 35 °C - 35 °C - 35 °C - 35 °C - - - - - - - -
    Outer circle                          
    IP protection class IP54 IP54 IP54 IP54 IP54 - - - - - - - -
    General                          
    Certificates / standards CE declaration of conformity CE declaration of conformity CE declaration of conformity CE declaration of conformity CE declaration of conformity - - - - - - - -
    Ambient conditions                          
    Outside temperature 10 °C - 45 °C 10 °C - 45 °C 10 °C - 45 °C 10 °C - 45 °C 10 °C - 45 °C - - - - - - - -
    PDF <1MB
    Technical data sheet

    The technical data of all product versions as a download.

    Operation of the generator directly in the application environment

    The best performance for your application

    The robust design of the generator guarantees permanent availability in the industrial environment, thereby ensuring stable and uninterrupted operation with impressive productivity, even in critical long-term processes.

    Proven tube technology means that the highest output frequencies and voltages can be generated; the integrated thyristor controller technology enables the fast and precise power adjustment. The generator and oscillating circuit are available as separate modules in order to set up space-optimized work stations.

    The RF generator can be optimally adapted to different system environments due to different options.

    Matchbox

    Using a matchbox, known as an external circuit, the load (induction coil + workpiece) can be optimally adapted to the RF generator so that this can always output the maximum power. Various matchboxes are available for a variety of applications.

    Remote control unit

    The remote control unit provides the same scope of functions as the control panel on the generator. This means you can operate the generator directly in the application environment while simultaneously monitoring the heating process.

    The choice of suitable system components means that the RF generator can be optimally adjusted to the required application.

    The best process results due to sophisticated inductor design
    Inductors

    The inductor geometry is specifically adjusted for the required heating process (ring, line or mold inductor).

    Pyrometers for non-contact temperature measurements on different surfaces
    Pyrometers

    Pyrometers are used for non-contact temperature measurements on surfaces up to 3632 °F. A coupled program controller enables temperature profiles to be followed precisely.

    Professional cooling for heating processes: Process cooler with hoses
    Process cooler

    The process cooler ensures reliable dissipation of process heat. Versions are available for various power ranges.

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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    Individualized customer training is our strong point

    Experienced service engineers teach in-depth knowledge that is tailored to the requirements of the participants.

    Contact

    Downloads

    TruHeat HF Series 7000 brochure
    TruHeat HF Series 7000 brochure
    pdf - 412 KB
    Service & contact