Ultrashort pulse lasers from the TruMicro Series 5000 impress with extremely short pulses of less than 10 ps, as well as high pulse energies of up to 500 μJ. They vaporize virtually every material so quickly that heat influence cannot be detected. The patented two-stage laser power control with integrated external modulator makes the laser completely stable, from pulse to pulse and across the entire power range. The peak pulse powers are up to 40 MW.
Micro-materials processing: maximum productivity
The short and ultrashort pulse lasers from TRUMPF enable microprocessing with an optimal combination of quality, productivity, and profitability, with no limits in terms of industrial suitability. The particular pulse and power stability is achieved through the separation of pulse generation and pulse output. The patented control ensures monitoring of each individual pulse, and keeps the power and pulse energy at exactly the right level required for the application. The picosecond and femtosecond lasers of the TruMicro Series 5000 impress with their extremely short pulses and high pulse energy of up to 500 μJ. All of this together with excellent beam quality and high average powers of up to 150 W. This ensures maximum productivity in micro-materials processing. They vaporize virtually every material so quickly that heat influence cannot be detected. They are therefore, ideal for processing semiconductor materials, metals, dielectrics, plastics, and glasses.
The ultrafast power modulator keeps power and pulse energy at an exact level.
Process temperature-sensitive materials without significant heat input.
TruMicro lasers can be integrated easily and are compatible with all common interfaces.
100% of the average power even in individual pulses as a result of regenerative disk technology
The lasers, which are based on the successful TruMicro Series 5000, are designed for your everyday production tasks.
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Laser parameters | ||||||||||||||||
Average output power | 50 W | 40 W | 100 W | 80 W | 150 W | 120 W | 30 W | 25 W | 60 W | 50 W | 90 W | 75 W | 15 W | 30 W | 45 W | 36 W |
Beam quality (M²) | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional |
Wavelength | 1030 nm | 1030 nm | 1030 nm | 1030 nm | 1030 nm | 1030 nm | 515 nm | 515 nm | 515 nm | 515 nm | 515 nm | 515 nm | 343 nm | 343 nm | 343 nm | 343 nm |
Pulse duration | < 10 ps | 875 fs ± 125 fs | < 10 ps | 875 fs ± 125 fs | < 10 ps | 900 fs (Tolerance -150…+100fs) | < 10 ps | 800 fs ± 100 fs | < 10 ps | 800 fs ± 100 fs | < 10 ps | 800 fs | < 10 ps | < 10 ps | < 10 ps | 800 fs |
Maximum pulse energy | 500 µJ | 200 µJ | 500 µJ | 200 µJ | 250 µJ | 200 µJ | 150 µJ | 125 µJ | 150 µJ | 125 µJ | 150 µJ | 125 µJ | 75 µJ | 75 µJ | 75 µJ | 36 µJ |
Minimum repetition rate | 100 kHz | 200 kHz | 200 kHz | 400 kHz | 600 kHz | 600 kHz | 200 kHz | 200 kHz | 400 kHz | 400 kHz | 600 kHz | 600 kHz | 200 kHz | 400 kHz | 600 kHz | - |
Maximum repetition rate | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz |
Structural design | ||||||||||||||||
Dimensions of laser head (W x H x D) | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm |
Dimensions of supply unit (W x H x D) | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm |
Installation | ||||||||||||||||
Protection class | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 |
Ambient temperature | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C |
TruMicro 5050
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TruMicro 5050 Femto Edition
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TruMicro 5070
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TruMicro 5070 Femto Edition
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TruMicro 5080
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TruMicro 5080 Femto Edition
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TruMicro 5250
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TruMicro 5250 Femto Edition
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TruMicro 5270
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TruMicro 5270 Femto Edition
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TruMicro 5280
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TruMicro 5280 Femto Edition
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TruMicro 5350
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TruMicro 5370
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TruMicro 5380
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TruMicro 5380 Femto Edition
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Laser parameters | ||||||||||||||||
Average output power | 50 W | 40 W | 100 W | 80 W | 150 W | 120 W | 30 W | 25 W | 60 W | 50 W | 90 W | 75 W | 15 W | 30 W | 45 W | 36 W |
Beam quality (M²) | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional | < 1.3 Standard, M² < 1.2 optional |
Wavelength | 1030 nm | 1030 nm | 1030 nm | 1030 nm | 1030 nm | 1030 nm | 515 nm | 515 nm | 515 nm | 515 nm | 515 nm | 515 nm | 343 nm | 343 nm | 343 nm | 343 nm |
Pulse duration | < 10 ps | 875 fs ± 125 fs | < 10 ps | 875 fs ± 125 fs | < 10 ps | 900 fs (Tolerance -150…+100fs) | < 10 ps | 800 fs ± 100 fs | < 10 ps | 800 fs ± 100 fs | < 10 ps | 800 fs | < 10 ps | < 10 ps | < 10 ps | 800 fs |
Maximum pulse energy | 500 µJ | 200 µJ | 500 µJ | 200 µJ | 250 µJ | 200 µJ | 150 µJ | 125 µJ | 150 µJ | 125 µJ | 150 µJ | 125 µJ | 75 µJ | 75 µJ | 75 µJ | 36 µJ |
Minimum repetition rate | 100 kHz | 200 kHz | 200 kHz | 400 kHz | 600 kHz | 600 kHz | 200 kHz | 200 kHz | 400 kHz | 400 kHz | 600 kHz | 600 kHz | 200 kHz | 400 kHz | 600 kHz | - |
Maximum repetition rate | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz | 1000 kHz |
Structural design | ||||||||||||||||
Dimensions of laser head (W x H x D) | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm | 680 mm x 289 mm x 1060 mm |
Dimensions of supply unit (W x H x D) | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm | 442 mm x 1192 mm x 910 mm |
Installation | ||||||||||||||||
Protection class | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 | IP54 |
Ambient temperature | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C | 20 °C - 30 °C |
The technical data of all product versions as a download.

TruControl
TruControl is the quick and easy-to-use control for TRUMPF solid-state lasers. It regulates the laser power in real time in order to deliver reproducible results. TruControl manages, controls, and visualizes the interface configuration. You benefit from a uniform control architecture across all laser technologies. The lasers have interfaces to control intelligent TRUMPF optics, such as monitored CFO focusing optics or PFO scanner optics. You can easily program the processing optics via the laser control system. The remote support service provided by TRUMPF means that you receive off-site support within seconds. This will allow you to avoid service calls or be as prepared as possible and increase the availability of the laser device.
Useful additional options of the TruMicro Series 5000 lasers enable you to work more efficiently and with more process reliability

Interfaces are key for the integration of a TruMicro laser in your machine or production line. The solid-state lasers from TRUMPF offer interfaces to all common fieldbus systems. Also available: real-time interface, parallel digital I/O, interface for process sensor systems, OPC UA software interface, analog input board, interface for intelligent TRUMPF optics (CFO, PFO).

In the event of a fault, TRUMPF service experts will remotely access your laser via a secure remote connection. In many cases the fault can be remedied directly in this way, or the configuration of the laser can be modified in a way that permits you to continue manufacturing until the spare part arrives.
In the event of a fault, TRUMPF service experts will remotely access your laser via a secure remote connection. In many cases the fault can be remedied directly in this way, or the configuration of the laser can be modified in a way that permits you to continue manufacturing until the spare part arrives.
TRUMPF offers you all the components you need for beam guidance from the laser to the workpiece. This also applies for various focusing optics which have proven themselves to be precise and reliable over many years of industrial use. The optics can be easily integrated – both in stand-alone processing stations as well as in complete production lines. The modular structure enables the optics to be continually adapted to the laser types as well as various processing situations.
TOP Cleave cutting optics
The focusing optics TOP Cleave are processing optics for quickly cutting transparent materials such as glass or sapphire.
Ultrashort laser pulses are not only ultrashort; they also achieve peak values for pulse qualities such as energy and power. To ensure that the correct pulse is applied on the workpiece despite the peak intensity, special beam guidance and formation elements are required. TRUMPF offers beam switches, deflectors, beam expanders, and polarization optics that are optimized for use with ultrashort pulse lasers.

TruMicro deflectors are well-suited for ultrashort laser pulses for guiding the laser beam while maintaining the pulse parameters.

A beam splitter enables two light paths to be powered at the same time, each with half the laser power, as well as two workpieces to be processed at the same time. The mechanical setting makes it possible to adjust the divided power precisely to the uniform distribution in both beam arms.

With beam switches, the laser light can be guided in two light paths for different workpieces. The pilot laser enables simple adjustment of the beam guidance.

Circular polarized light is produced from linear polarized light with the help of a quarter wave plate and makes it possible to achieve consistent processing results for applications with directional production geometries.
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.