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TruMicro Series 6000

Our femtosecond powerhouse - for maximum throughput and high removal rates in series production

30 - 200 W Average power
257 nm, 343 nm, 515 nm, 1030 nm Wavelength
< 500 fs, < 850 fs, < 5 ps Pulse duration
2 mJ at 1 MHz Max. pulse energy

Product Variants TruMicro Series 6000 Average Power Beam quality (M²) Wavelength Pulse duration Maximum pulse energy Pulse repetition frequency
TruMicro 6020
200 W < 1.3 (optional < 1.2) 1030 nm < 850 fs, < 5 ps 200 µJ at 1 MHz or, 2 mJ at 100 kHz  2000 kHz (single pulse picking)
TruMicro 6220
100 W 515 nm < 850 fs 100 µJ at 1000 kHz 2000 kHz
TruMicro 6320
30 W (< 500 fs) or, 62.5 W (< 850 fs) 343 nm < 500 fs or, < 850 fs 37.5 µJ at 800 kHz (30 W) or, 62.5 µJ at 1 MHz (62.5 W) 

High pulse energy

– For complex processes and high-volume production

The TruMicro Series 6000 lasers are specifically designed for processes that require high pulse energies. Depending on your application, you can choose from models with different wavelength, pulse durations down to the femtosecond range, and pulse energies of up to 2 millijoules. Lasers thus cover a wide range of applications - from the quick cutting of battery films to the engraving of coated brake disks, and the ablation of glass up to 10 millimeters thick. They also demonstrate their strengths in series production: With high average power, they deliver the necessary throughput and, thanks to their robust and stable design, have already proven themselves time and again in industrial 24/7 operation.

What sets the TruMicro Series 6000 apart

– Your special features at a glance
Produce faster - with more power thanks to high pulse energy
Produce faster - with more power thanks to high pulse energy

The lasers in the TruMicro Series 6000 offer higher pulse energy than those in the TruMicro Series 2000. This allows you to increase production speed while maintaining the same pulse repetition frequency, enabling you to efficiently process even large components such as wafers or PCBs.

Suitable for any material thanks to the appropriate wavelengths
Suitable for any material thanks to the appropriate wavelengths

TruMicro Series 6000 lasers are available in different wavelength depending on the material you want to process. Infrared lasers are suitable for ceramics and glass. Lasers with a green wavelength are particularly suitable for non-ferrous metals such as brass or copper, as well as organic materials. UV lasers are used for films, plastics, and PCBs, while DUV lasers are used for film stacks and multilayer films.

Gentle machining - thanks to ultrashort pulsing
Gentle machining - thanks to ultrashort pulsing

The TruMicro Series 6000 uses ultrashort pulses that deliver their energy into the material in an extremely short amount of time. This results in virtually no heat-affected zone, enabling cold machining without deformations, burn marks, or time-consuming rework. At the same time, each individual pulse removes material in a targeted manner without energy accumulating in the component. This allows you to control material removal with precision and achieve consistently reproducible results. This method allows even strongly reflective materials, such as copper or transparent materials, to be processed reliably.

Flexible for any task - with precisely controllable pulse parameters
Flexible for any task - with precisely controllable pulse parameters

You can flexibly adjust the pulse energy and pulse repetition frequency to suit the material and application. Each individual pulse is energetically stabilized, ensuring reproducible results. With short pulse durations in the femtosecond range, you can keep heat input to a minimum. The pulse repetition frequency can also be adjusted during the process - for example, to match the feed rate of the processing optics.

Clean along every contour with an adjusted pulse repetition frequency
Clean along every contour with an adjusted pulse repetition frequency

With Advanced Pulse on Demand, the TruMicro Series 6000 triggers each laser pulse exactly when it is needed. This function keeps the pulse interval constant even when the feed rate changes - for example, in curves where the laser beam is guided more slowly. This prevents pulses from overlapping and allows them to be precisely placed along the desired contour with a spatial resolution down to the submicrometer range. This also ensures consistent, reproducible results even for short, complex contours with frequent changes in speed and direction -such as extremely fine recesses like display notches.

Versatile material effects thanks to flexible operating modes
Versatile material effects thanks to flexible operating modes

Depending on the application, you can determine how the laser emits its pulses: from individual ultrashort pulses to high pulse repetition frequencies in quasi-continuous-wave (QCW) mode. In burst mode, you combine multiple ultrashort pulses into a compact pulse train and precisely control their timing and energy distribution. For example, this allows you to melt surfaces in a controlled manner or ablate material more efficiently. Particularly when working with metals, this opens up additional possibilities to specifically tailor the machining process to the relevant application.

Further advantages

  • Easy to integrate, flexible to expand - thanks to standard fieldbus interfaces

    The TruMicro Series 6000 offers interfaces to all common fieldbus systems, allowing you to easily integrate the lasers into the central control of your automated production line. This reduces the amount of wiring required and makes it easier to expand the system at a later date.

The TruMicro Series 6000 in action

– What you can expect

A variety of materials, high production volumes, and consistently precise results: That is what the TruMicro Series 6000 is designed for. The range of applications extends from cutting PCB films to drilling and ablating ceramics, and cutting edge separation layers for semiconductor production.

Paper-thin film cutting

Paper-thin film cutting

Cutting ultra-thin battery films quickly and cleanly is a challenging task: Burrs can form along the cutting edges, and when working with copper, reflections can also cause thermal damage.

The lasers in the TruMicro Series 6000 minimize heat input with ultrashort, high-energy pulsing. This enables you to cleanly cut even the thinnest materials and avoid burning or tearing. This extends the service life of the products and reduces your material costs.

Cutting glass cleanly

Cutting glass cleanly

When cutting glass for foldable displays, for example, you need smooth cut edges with low surface roughness, which often requires time-consuming rework afterwards.

With TruMicro Series 6000 lasers and our TOP Cleave optics, you can modify the cutting edge in a single pass at speeds of up to several meters per second. This results in a surface roughness of < 1 µm, so no rework is necessary.

Microholes in interposers

Microholes in interposers

Used in glass interposers for microchips, so-called "Through Glass Vias" (TGVs), to provide the electrical connection between the various layers. To do this, hundreds of holes or channels must be drilled with pinpoint accuracy and at high-speed.

The TruMicro Series 6000 offers ultrashort pulses, high pulse energies, and the ability to generate pulse trains (bursts). When combined with our TOP Cleave optics, this allows you to create a channel through the entire material with a single shot. This modification can then be opened up to form a TGV through selective laser etching, for example. Advanced Pulse on Demand precisely controls each pulse, enabling high processing speeds with accurate positioning.

Precise, high-speed wafer separation

Precise, high-speed wafer separation

Mechanical saws are relatively slow when it comes to separating wafers. The hard wafer material also causes them to wear quickly, which makes them very high-maintenance.

Ultrashort laser pulses are largely insensitive to material properties and therefore cover a wide range of ablative applications. With its high pulse energy, the TruMicro Series 6000 reliably processes even crystalline and brittle-hard materials, such as silicon. And because the laser operates without contact, there is no wear.

Targeted functionalization of surfaces

Targeted functionalization of surfaces

They must precisely structure, engrave, or clean surfaces made of various materials - such as glass, copper, gold, and ceramics -and specifically impart certain functions to them, such as an anti-glare effect.

With the ultra-short pulses of the TruMicro Series 6000, you can precisely modify surfaces and give them the desired properties. The combination of high pulse energy and energy stability makes it possible, for example, to distribute the energy over a larger area using beam-shaping elements. This allows you to achieve high processing speeds even when machining large surfaces.

One system. Everything from TRUMPF.

– Discover available components and services for this laser

A laser alone is not a solution. Only in combination with precise optics, intelligent sensor technology and tailor-made services can a system be created that makes your applications possible and ensures reliable processes. With TRUMPF, you have a partner who not only supplies technology, but also reliable process results - solutions that measurably advance your production and pay off through sustainable success.

A conversation with TRUMPF service engineers

Services for maximum system availability

to keep your production running

Overview

How much standstill can you afford? Production downtime costs time, money - and, in the worst case, customers. To ensure that your lasers and laser systems remain operational in the long term, we support you with sophisticated services. This includes predictive condition monitoring, rapid assistance in the event of an emergency and individual service packages at fixed, predictable costs - tailored precisely to your needs.

Condition Monitoring key visual

Condition Monitoring for lasers and laser systems

With Condition Monitoring, our experts - supported by TRUMPF's own algorithms - keep a constant eye on the condition of your lasers. Critical changes are detected at an early stage before unplanned downtime occurs.

Condition Monitoring, Servicetechniker repariert Maschine

Technical Service

No matter where you produce: Our service engineers will be there for you quickly if the worst comes to the worst. Thanks to in-depth manufacturer know-how and regular training, they have outstanding expertise - and ensure that your lasers and laser systems are quickly ready for use again.

Remote Support

In the event of a fault, every minute counts: With TRUMPF Remote Support, you receive immediate help from our experts - via secure remote access, without having to travel or wait for a service technician.

Technical Service Genuine Parts key visual

Genuine Parts

Our TRUMPF Genuine Parts are perfectly matched to your lasers and laser systems, available worldwide - and can be delivered to you quickly in an emergency. For maximum performance, minimum downtime and long-term investment security.

TRUMPF Service Agreements key visual

Service Agreements

As much service as you need: Our Service Agreements offer graduated service packages - tailored precisely to your needs and at fixed, predictable costs. From Remote Support and maintenance to full service packages.

Services for performance optimization

so that performance becomes best performance

Overview

Do you want to get more out of your production? Unclear data, complex requirements or unexpected errors often slow down production. Our solutions help you to overcome these hurdles - with structured data management, individual application support and training or AI-supported process optimization. This allows you to improve your processes, reduce errors and react more flexibly to new challenges.

Smart View for lasers and laser systems

Keep an eye on all relevant data: With Smart View, you can create individual dashboards with precisely the information and key figures that are crucial for the optimal use of your lasers and laser systems - from performance data to statuses and energy consumption through to program changes.

Process optimization

Advice in our application centers

In our laser application centers at eight locations worldwide, we work with you to optimize processes, solve application-specific challenges - and thus create the basis for consistent quality, shorter start-up phases and a faster time to market.

Is the laser suitable for your project?
Let us find out!

In our laser application centers (LAC), we work with you to determine the optimum parameters for your application - even directly on your component.

Inquire now

Questions? Ideas? Concrete plans?
We can help you!

Whether technical details, prices or individual requirements: Whatever your concerns - we will give you the answer that will help you move forward.

Downloads

Short and ultrashort pulse laser brochure Short and ultrashort pulse laser brochure

An overview of all TruMicro short and ultrashort pulse lasers from TRUMPF.

Flyer: TruMicro 6000 Flyer: TruMicro 6000

A comparison of our TruMicro range

Product TruMicro Series 6000, product image

TruMicro Series 6000

Our femtosecond powerhouse - for maximum throughput and high removal rates in series production
TruMicro Series 2000

TruMicro Series 2000

Our compact precision machine – delicate microprocessing with maximum flexibility in the process parameters
TruMicro 9010

TruMicro Series 9000

Our pioneer - groundbreaking microprocessing of large surfaces with 1 kW power
Average power 30 W - 200 W 10 W - 20 W 1000 W
Wavelength 343 nm, 515 nm, 1030 nm 515 nm, 1030 nm 1030 nm
Beam quality (M²) < 1.3 (optional ≤ 1.2) < 1.2 (<1.3 bei 515 nm) < 1.3
Pulse duration < 850 fs (optional < 5 ps at 1030 nm and < 500 fs at 343 nm) < 350 fs  (1030 nm, variably adjustable up to 20 ps) 1 ps (optional fixed value between 1 and 20 ps)
Maximum pulse energy 2 mJ with 100 kHz 100 µJ with 200 kHz 10 mJ with 100 kHz
Pulse repetition frequency Single shot up to 3 MHz (50 MHz with QCW option) Single shot up to  2 MHz (50 MHz with QCW option) Single shot up to 1 MHz (50 MHz with QCW option)

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.