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Plasma excitation
TRUMPF Hüttinger

TruPlasma RF Air Series 1000

Accuracy you can rely on

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    • Overview
    • Applications
    • Technical data
    • Customer benefits
    • Options
    • Software
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    The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 watts of high-precision, reproducible RF energy with an extremely fine resolution – in increments of 100 mW – and is thus suitable for diverse plasma applications. Whether manufacturing semi-conductors, solar cells or displays – the patented TRUMPF Hüttinger Technology guarantees top reliability and the best process results throughout thanks to modern process functions.

    Smart auto frequency tuning

    Guarantees optimum and very fast frequency tuning, and thus an optimum interaction between the generator and matchbox.

    High-precision arc management

    Safe operation of demanding and new processes ensures your product is protected.

    Multi-level pulsing

    Multi-level, flexible control of the pulse shape for improved process results in modern plasma processes.

    Plug & Play

    Flexible use and replacement of generators possible in the event of process changes or retrofitting.

    Stable plasma processes

    The patented CombineLine technology guarantees uniform process power thanks to a true output impedance of 50 ohms.

    Uniform generator technology

    With various power classes within the RF product family, all process requirements can be met.

    Independence from the RF cable length

    In the event of process changes or changes to the system, it is no longer necessary to adjust the cable lengths.

    First-rate power supply for the coating of flat screens

    TruPlasma RF Air Series 1000 RF generators are perfectly suited to plasma processes such as reactive-ion etching (RIE), atomic layer deposition (ALD), plasma-enhanced chemical vapour deposition (PECVD) and RF sputtering. These processes are used, among other things, for manufacturing semi-conductor components and micro-electromechanical systems (MEMS) as well as for coating flat screens and solar cells.

    Photovoltaic cell production

    Typical areas of application for the TruPlasma RF Air Series 1000 include demanding plasma-enhanced chemical vapour deposition, etching and RF sputtering processes in the solar industry.

    Image of the technology inside the RF plasma generators

    Various plasma processes are used to manufacture semi-conductors, from removal processes such as dry etching to zone refining in the production of pure silicon. The generators from the TruPlasma RF Air Series 1000 provide all of the conditions for a power supply that is stable and optimally adjusted to the respective process, ensuring that you achieve excellent, reproducible results.

    TruPlasma RF 1001 Air
    RF output  
    Output power 1 kW
    Rated power 1 kW
    Nominal load impedance 50 Ω
    Output frequency 13.56 MHz
    Network connection data  
    Line voltage 110 - 230 V
    Line frequency 50-60 Hz
    Line input power 1.8 kVA
    Power factor 0.9
    Communication interfaces  
    Sync interfaces Yes
    Analog/digital Yes
    RS 232 / RS 485 Yes
    PROFIBUS Yes
    EtherCAT Yes
    DeviceNet Yes
    Housing  
    Weight 15 kg
    IP protection class 20
    Cooling requirements  
    Max. water pressure N/A bar
    Min. pressure difference N/A bar
    Min. flow rate N/A l/min
    Cooling medium temperature 5 °C - 35 °C
    General  
    Overall efficiency 70 %
    Certificates / standards SEMI S2, SEMI F47, UL, CE, RoHs
    Ambient conditions  
    Outside temperature 5 °C - 40 °C
    Humidity 5 % - 85 %
    Barometric pressure 79.5 kPa - 106 kPa
    PDF <1MB
    Technical data sheet

    The technical data of all product versions as a download.

    Maximum productivity and availability

    Maximum productivity and availability

    The flexible, robust design of the RF generators allows the throughput to be increased and the operating costs to be reduced.

    Patented CombineLine technology

    Stable processes, reproducible results

    The patented CombineLine technology with intelligent real time matching guarantees optimum availability of the TruPlasma RF 1001 Air, and reliably prevents plasma fluctuations and impurities.

    Compact and flexible application

    Thanks to the compact design (½-19-inch plug-in unit), the RF generator is very space-saving – ideal for new installations and as a retrofit solution in existing systems. It can be integrated very easily due to numerous available interfaces (configurable analogue interface, Ethernet, DeviceNet, PROFIBUS, EtherCAT).

    Perfectly suited to etching and coating processes

    Accurate to the decimal place

    Thanks to precise energy dosing in increments of 100 mW, top results can be achieved with the TruPlasma RF 1001 Air, even in the most modern and demanding applications, such as atomic layer deposition (ALD). The high-precision power regulation of the RF generator guarantees top wafer-to-wafer repeatability.

    Architectural glass

    Top process results thanks to modern process functions

    Digital control functions, such as smart auto frequency tuning 2.0, arc management and multi-level pulsing allow the RF generator to be optimally adapted to the relevant process.

    TruPlasma RF 1003: RF generator for maximum productivity

    Flexible adaption to the customer application

    Different power classes and frequencies are available in the uniform generator design – this means that it is easier to make replacements in the event of process changes. It is also no longer necessary to adjust the cable lengths.

    Control of the complete RF system via the TRUMPF SystemPort

    SystemPort enables closed loop control by measuring the RF signal directly at the input and output of the matchbox, meaning that all measured values are always available to the RF generator. The process parameters are continuously monitored, the matchbox is protected and early arc detection is ensured.

    Auto Frequency Tuning
    Smart auto frequency tuning (AFT)

    The patented auto frequency tuning solution enables simultaneous and fast frequency tuning between the generator and matchbox. Best process results and top reproducibility are thus guaranteed.

    Fast and precise arc management

    Well thought-out arc management ensures optimum control of the plasma process. Productivity is increased due to targeted arc detection; at the same time, the product and system are protected against damage.

    Multi-level pulsing

    The latest plasma processes require increased flexibility during the pulsing mode. Any type of pulse shape can be achieved with the multi-level, freely-selectable pulsing mode. This results in a new control mechanism in plasma physics and in improved process results.

    Synchronisation module (pulse, CEX, arc)

    The synchronisation module allows flexible and safer synchronisation of multiple generators in complex plasma systems.

    TruControl Power

    The easy-to-use control software enables convenient start-up and secure monitoring of the RF generator or the entire TRUMPF RF system during the ongoing process.

    Web GUI

    The integrated web server enables both RF system operation and software updates via a web browser.

    This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

    Contact

    Klaus Nock
    Plasma Sales
    Fax +49 761 89711150
    E-mail

    Downloads

    TruPlasma RF System brochure
    pdf - 6 MB
    Service & contact