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DC Plasma Excitation technology

Plasma Excitation

The plasma generators from TRUMPF Hüttinger provide the process stability required for many high-tech industries and make functional coating of solar cells and microchips possible, as well as coating of large surfaces of architectural glass and the manufacture of semi-conductor elements and flat screens. They are some of the front runners on the market thanks to their outstanding precision, energy efficiency and high process stability.

MF Plasma Excitation

They are the ideal solution for numerous applications in plasma excitation thanks to outstanding precision and productivity.

DC Pulsed Plasma Excitation

DC pulsed plasma excitation from TRUMPF Hüttinger is ideal for use in numerous reactive processes.

DC Plasma Excitation

Direct current generators from TRUMPF Hüttinger are classics when it comes to DC plasma excitation.

RF Plasma Excitation

The first choice for demanding applications such as the manufacture of semi-conductor elements, microchips, solar cells or flat screens.

MF Plasma Excitation

TruPlasma MF Series 7000 (G2)

TruPlasma MF Series 7000 (G2)

With the TruPlasma Series MF 7000 (G2) MF generators you always have complete control of your process – resulting in excellent layer qualities and optimum productivity, even for the demanding coating of large areas. Featuring peak efficiencies of over 90%, these power supplies of the latest generation are also extremely cost-effective to operate.

DC Pulsed Plasma Excitation

DC Plasma Excitation

TruPlasma DC 3040 direct current generator

TruPlasma DC Series 3000 (G2)

As a new generation of DC generators, the TruPlasma DC Series 3000 (G2) is suited to numerous DC sputtering processes. The DC generators also make an interesting cost-effective alternative to pulsed DC generators due to their progressive arc management and the integrated water cooling. The very compact design also enables simple integration into existing applications.

TruPlasma Arc Series 3000 arc generator

TruPlasma Arc Series 3000

The TruPlasma Arc Series 3000 generators are particularly impressive for hard material and decorative coatings. With its compact design and air cooling, valuable space is optimized and the unit can be easily integrated into new or existing systems.

RF Plasma Excitation

Generator der TruPlasma RF Air Serie

TruPlasma RF Air Series 1000

The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 watts of high-precision, reproducible RF energy with an extremely fine resolution – in increments of 100 mW – and is thus suitable for diverse plasma applications. Whether manufacturing semi-conductors, solar cells, or displays – the patented TRUMPF Hüttinger Technology guarantees top availability and the best process results throughout due to modern process functions.

VHF Generator Series 3000

TruPlasma VHF Series 3000

The highest power for your process: The generators of the TruPlasma VHF series 3000 are based on an innovative platform concept which meets even the toughest process demands. The modular design of the VHF generators, which are purely cooled by water, enables the output power to be scaled by up to 80 kW – and this with the smallest footprint!

RF system solution: matchbox for the highest process stability

TruPlasma Match Series 1000 (G2/13)

The exact matching of the output impedance of the RF generator is decisive for an optimal plasma process. This is achieved by the matchboxes of the TruPlasma Match Series 1000 (G2/13) as a link between the generator and the process. This results in a comprehensive solution for your process power supply – the TRUMPF RF system.

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Nikolas Hunzinger
Sales TRUMPF Hüttinger
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