Complete control over the process
The TruPlasma Series MF 7000 (G2) puts you in control of your process at all times: With their superior arc management and ignition behavior, the generators are perfect as power supplies for large area coating and demanding reactive processes during dual magnetron sputtering. Featuring peak efficiencies of more than 90%, and particularly efficient cooling water management, the generators are also extremely cost-effective to operate.
First-rate MF power supply
Large area coating of architectural glazing: Sophisticated materials such as SiOx place high demands on the stability of the power supply.
Application of the thinnest layers
Coating of flat screens and touch panels: Dual magnetron sputtering is used to apply ultra-thin (nm), high-strength, and homogeneous AlxOx coatings.
Photovoltaic cell production
Coating of solar glass: The stable power supply of the TruPlasma MF Series 7000 (G2) enables the homogeneous application of ultra-thin transparent conductive coatings (TCO) using MF sputtering.
Maximum cost-effectiveness and flexibility
The high operating efficiencies and the flexible cooling concept of the TruPlasma MF Series 7000 (G2) guarantee maximum cost-effectiveness over the entire service life. Even under difficult ambient and installation conditions, the power supply remains stable at all times – high cooling water temperatures, low water pressures, and high humidity levels do not impair the process quality. With its wide operating voltage range, you can use the MF generator worldwide without technical modifications.
Precise process control
With just a few parameter settings, you can precisely control the coating quality and productivity. This helps you achieve an optimal balance between the sensitivity of the ARC treatment and the desired throughput. A variety of interfaces and the convenient TruControl Power operating program also enable effective configuration and diagnostics.
Superior ARC management
High reaction speeds and correspondingly reduced residual energy ensure stable processes and the highest possible sputter rates. Arc formation and thermal stress on the targets is reliably detected and prevented by the generator – the result is absolutely homogeneous coatings across the entire substrate surface. The fast and reliable arc management also enables trouble-free operation of the generator in the voltage-controlled transition range (transition mode).
A comprehensive range of options is available for the TruPlasma MF Series 7000 (G2) to help you adjust your MF generator to meet the requirements of your application.
For environments with very high humidity, the generator switch cabinet can be equipped with an active dehumidifier unit. Cooling water control is required to operate the unit.
The switch cabinet door is available with a particularly wide opening of 180 degrees as an option (130 degrees is standard).
Profinet, Profibus, EtherCAT as well as analog and digital interfaces enable the simple integration of the TruPlasma MF Series 7000 into existing systems.
The TruPlasma MF Series 7000 (G2) can be equipped with highly sensitive ARC management (UltraFastTreatment ≤ 1 mJ/kW; ≤ 10 mJ/kW is standard). Safety category 3 is required for UltraFastTreatment.
This reduces ARC formation and thermal stress. The ignition voltage and ramp time can be individually controlled.
The MF generators with power up to 100 kW are available as an option with an extended frequency range of 20 - 70 kHz (20 - 50 kHz is standard).
The user-friendly, multilingual TruControl Power software offers you versatile options for operation, configuration, and diagnostics.
By selecting suitable system components, you can optimally adjust your TruPlasma MF Series 7000 (G2) to your system environment.
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.