TruPlasma RF Series 1000 / 3000 (G2/13)

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Auto Frequency Tuning

A countermeasure against rapid fluctuations in the plasma’s impedance range is automatic frequency tuning, during which the RF generator sets its fundamental oscillation to a frequency value with better adaptation within a time frame of less than one millisecond.

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Precision in processing

Continuous improvements of semiconductor processes are required to ensure a continuous reduction in size. This in turn requires RF generators that have an even higher signal quality in relation to output power and time resolution.

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RF-Systemlösung : Matchbox für höchste Prozessstabilität

Intelligent matching through real-time measurement

The new TruPlasma Match Series 1000 (G2/13) matchboxes are ideal additions to our RF generators and help to provide a comprehensive solution: the TRUMPF RF system.

Perfectly suited to the coating of large areas

Power supplies for your plasma process

Plasma generators from TRUMPF Hüttinger have a broad power and frequency spectrum. Find out about our products here.

Punch laser machines

All the advantages of punch and laser processing combined: TRUMPF punch laser machines enable you to produce a wide range of parts in small or large quantities.

Contact

Ehab Alhawari

Telephone +49 761 89712115

Services

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Downloads

Plug and Play Kits - Your Retrofit Solution

pdf - 1 MB

Flyer TruPlasma RF Series 1000

pdf - 7 MB