The TQZ covers an area of more than 1000 m² and offers extensive testing facilities. Two plasma chambers enable power supplies to be tested on real plasma. The MF plasma chamber has a target length corresponding to a standard glass coater and enables high-power MF generators to be tested. In order to test RF, DC, and MF generators with lower power outputs, the TQZ is equipped with an additional plasma chamber featuring a 60 cm long magnetron sputtering cathode.
The TQZ also has its own HALT chamber in order to perform accelerated life tests. A power system simulation facility and an EMC system round off the testing and qualification facilities.