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TruMicro Series 6000

Our femtosecond powerhouse – for maximum throughput and high removal rates in series production

30 - 200 W Average power

257 nm, 343 nm, 515 nm, 1030 nm Wavelength

< 500 fs, < 850 fs, < 5 ps Pulse duration

2 mJ at 1 MHz Max. pulse energy

Product variants TruMicro Series 6000	Average power	Beam quality (M²)	Wavelength	Pulse duration	Maximum pulse energy	Repetition rate
TruMicro 6020	200 W	< 1.3 (optional < 1,2)	1030 nm	< 850 fs, < 5 ps	200 µJ bei 1 MHz oder, 2 mJ bei 100 kHz	2000 kHz (single pulse picking)
TruMicro 6220	100 W	< 1.3 (optional < 1,2)	515 nm	< 850 fs	100 µJ bei 1000 kHz	2000 kHz
TruMicro 6320	30 W (< 500 fs) or, 50 W (< 850 fs)	< 1.3 , optional < 1.2	343 nm	< 500 fs or	37.5 µJ at 800 kHz (30 W), 50 µJ at 1 MHz (50 W)	2000 kHz

High pulse energy

– for complex processes and high-volume production

The TruMicro Series 6000 lasers are designed specifically for processes that require high pulse energies. Depending on your application, you can choose from models with different wavelengths, pulse durations down to the femtosecond range, and pulse energies of up to 2 millijoules. Lasers cover a wide range of applications – fromthe rapid cutting of battery foils to the engraving of coated brake discs and the ablation of glass up to 10 millimetres thick. They also demonstrate their strengths in series production. With high average power, they deliver the necessary throughput and, thanks to their robust and stable design, have already proven themselves time and again in 24/7 industrial operations.

What makes the TruMicro Series 6000 special

– Your special features at a glance

Faster production – with more power thanks to high pulse energy

The lasers in the TruMicro Series 6000 offer higher pulse energy than those in the TruMicro Series 2000. This allows you to increase production speed while maintaining the same repetition rate and efficiently process even large components such as wafers or PCBs.

Suitable for any material – thanks to suitable wavelengths

The TruMicro 6000 Series lasers are available in different wavelengths – depending on the material you want to process. Infrared lasers are suitable for ceramics and glass. Lasers with a green wavelength are particularly suitable for non-ferrous metals such as brass or copper, as well as organic materials. UV lasers are used for films, plastics, and PCBs, while DUV lasers are used for film stacks and multilayer films.

Gentle material processing – thanks to ultrashort pulses

The TruMicro Series 6000 uses ultrashort pulses that deliver their energy into the material in an extremely short amount of time. This results in virtually no heat-affected zone – enabling cold machining without deformation, burn marks, or time-consuming rework. At the same time, each individual pulse selectively removes material without allowing energy to accumulate in the component. This allows you to control material removal precisely and achieve consistently reproducible results. This method makes it possible to reliably process even highly reflective materials – such as copper – or transparent materials.

Flexible for any task – with precisely controllable pulse parameters

You can flexibly adjust the pulse energy and pulse repetition frequency to suit the material and application. Each individual pulse is energetically stabilised, which helps to ensure reproducible results. With short pulse durations in the femtosecond range, you can keep heat input to a minimum. The repetition rate can also be adjusted during the process – for example, to match the feed rate of the machining optics.

Clean along every contour – with an adjusted pulse repetition frequency

With Advanced Pulse on Demand, the TruMicro Series 6000 triggers each laser pulse exactly when it is needed. This feature keeps the pulse spacing constant even when the feed rate changes – for example, in curves where the laser beam is guided more slowly. This prevents the pulses from overlapping and allows them to be precisely placed along the desired contour with a spatial resolution down to the sub-micrometer range. This ensures consistent, reproducible results even for short, complex contours with frequent changes in speed and direction – such as in the case of extremely fine cutouts like display notches.

Versatile material effects – thanks to flexible operating modes

Depending on the application, you can determine how the laser emits its pulses – from individual ultrashort pulses to high repetition rates in quasi-continuous-wave (QCW) mode. In burst mode, you combine multiple ultrashort pulses into a compact pulse train and precisely control their timing and energy distribution. For example, this allows you to melt surfaces in a controlled manner or remove material more efficiently. This opens up additional possibilities – particularly when it comes to metals – for tailoring the machining process specifically to the respective application.

Further advantages

Easy to integrate, flexible to expand – thanks to standard fieldbus interfaces
The TruMicro 6000 series provides interfaces to all common fieldbus systems, allowing you to easily integrate the lasers into the central control of your automated production line. This reduces the amount of wiring required and makes it easier to expand the system later.

The TruMicro Series 6000 in use

– What to expect

A variety of materials, high-volume production, and consistently precise results: That's what the TruMicro Series 6000 is designed for. The range of applications extends from cutting PCB films to drilling and ablating ceramics to cutting separating layers for semiconductor production.

Cutting ultra-thin films

Cutting ultra-thin battery films quickly and cleanly is a challenging task. Burrs can form along the cut edges, and when using copper, reflections can also cause thermal damage.

The lasers in the TruMicro Series 6000 minimise heat input using ultrashort, high-energy pulses. This helps to cleanly process even the thinnest materials and avoid burning or tearing. This extends the service life of the products and reduces your material costs.

Cutting glass cleanly

When cutting glass – for example, for folding displays – you need smooth cut edges with low surface roughness, which often requires time-consuming rework afterwards.

With the TruMicro Series 6000 lasers and our TOP Cleave optics, you can modify the cut edge in a single pass at speeds of up to several metres per second. This results in a surface roughness of < 1 µm, so no rework is necessary.

Micro-holes in interposers

In glass interposers for microchips, "Through Glass Vias" (TGVs) provide the electrical connection between the various layers. To achieve this, hundreds of holes or channels must be drilled with pinpoint accuracy and at high speed.

The TruMicro Series 6000 offers ultrashort pulses, high pulse energies, and the ability to generate pulse bursts. When combined with our TOP Cleave optics, this allows you to create a channel through the entire material with a single shot. This modification can then be opened up to form a TGV, for example, through selective laser etching. Advanced Pulse on Demand precisely controls each pulse, enabling high processing speeds with accurate positioning.

High-speed, precise wafer separation

Mechanical saws are relatively slow when it comes to separating wafers. The hard wafer material also causes them to wear out quickly, which means they require a lot of maintenance.

Ultrashort laser pulses are largely insensitive to material properties and so cover a wide range of ablative applications. With its high pulse energy, the TruMicro Series 6000 reliably processes even crystalline and brittle, hard materials such as silicon. And because the laser operates without contact, there is no wear and tear.

Targeted functionalization of surfaces

They need to precisely texture, engrave or clean surfaces made of different materials, such as glass, copper, gold and ceramics, and specifically add certain functions to them – such as an anti-glare effect.

The ultra-short pulses of the TruMicro 6000 Series allow you to modify surfaces precisely and give them the desired properties. The combination of high pulse energy and energy stability makes it possible, for example, to distribute the energy over a larger area using beam-shaping elements. This allows you to achieve high processing speeds even when machining large surfaces.

One system. All TRUMPF

– Explore the components and services available for this laser

A laser on its own is not a solution. Only when combined with precise optics, intelligent sensors and bespoke services can a system be created that makes your applications possible and ensures reliable processes. In TRUMPF, you have a partner who not only delivers technology, but reliable process results – solutions that tangibly advance your production and pay off through sustainable success.

Services for maximum system availability

to keep your production running

Overview

How much downtime can you afford? Downtime costs time, money – and in the worst case, customers too. We provide a comprehensive range of services to ensure that your lasers and laser systems remain operational at all times. This includes predictive condition monitoring, rapid assistance in an emergency as well as customised service packages at fixed, predictable costs – tailored precisely to your needs.

Condition Monitoring for lasers and laser systems

Our experts use Condition Monitoring – supported by TRUMPF's own algorithms – to continuously monitor the condition of your lasers. Critical changes are detected at an early stage before unplanned outages occur.

Condition Monitoring, Servicetechniker repariert Maschine

Technical Service

No matter where your manufacturing site is located, our service engineers are there for you quickly in the event of an emergency. Thanks to in-depth manufacturer knowledge and regular training courses, they have outstanding expertise – and ensure that your lasers and laser systems are back up and running in no time.

Remote Support

In the event of a malfunction, every minute counts. With TRUMPF Remote Support, you will immediately receive help from our experts – via secure remote access, without having to travel and wait for a service engineer.

Key visual: TRUMPF Technical Service Genuine Parts

Original Genuine Parts

Our TRUMPF Genuine Parts are perfectly matched to your lasers and laser systems, available worldwide – and can be delivered to you quickly in an emergency. For maximum performance, minimum idle time and long-term investment security.

Service Agreements

The right level of service for you – our service agreements offer tiered service packages that are tailored exactly to your needs and at fixed, predictable costs. From remote support to maintenance or a full-service package.

Performance optimisation services

turning performance into peak performance

Overview

Do you want to extract the maximum from your production? Unclear data, complex requirements or unexpected errors often slow down production. Our solutions help you overcome these hurdles – with structured data management, individual application support and training sessions, or AI-powered process optimisation. This can help you to improve your processes, reduce errors and respond more flexibly to new challenges.

Smart View for lasers and laser systems

Keep an eye on all relevant data – with Smart View, you can create individual dashboards with exactly the information and key figures that are crucial for the optimal use of your lasers and laser systems, from performance data to states and power input to program changes.

Consulting in our application centres

In our laser application centres at eight locations worldwide, we work with you to optimise processes, solve application-related challenges – helping to create the basis for consistent quality, shorter start-up phases and faster market entry.

Is the laser right for your project?
Let's find out!

In our Laser Application Centres (LAC), we work with you to determine the optimal parameters for your application – even on your component itself.

Enquire now

Questions? Ideas? Specific plans?
We're here to help!

Whether you have questions about technical details, prices or individual requirements we will give you the answers you need to move forward.

Downloads

Short and ultrashort pulse laser brochure

An overview of all TruMicro short and ultrashort pulse lasers from TRUMPF.

Flyer: TruMicro 6000

A comparison of our TruMicro family

Product	TruMicro Series 6000 Our femtosecond powerhouse – for maximum throughput and high removal rates in series production	TruMicro Series 2000 Our precision artists in a compact format – filigree microprocessing with maximum flexibility in process parameters	TruMicro Series 9000 Our trailblazer – groundbreaking microprocessing of large areas with 1 kW power
	Request offer	To the product	To the product
Average power	30 W - 200 W	10 W - 20 W	1000 W
Wavelength	343 nm, 515 nm, 1030 nm	515 nm, 1030 nm	1030 nm
Beam quality (M²)	< 1.3 (optional ≤ 1.2)	< 1.2 (<1.3 bei 515 nm)	< 1.3
Pulse duration	< 850 fs (optional < 5 ps at 1030 nm and < 500 fs at 343 nm)	< 350 fs (1030 nm, variably adjustable up to 20 ps)	1 ps (optional fixed value between 1 and 20 ps)
Maximum pulse energy	2 mJ with 100 kHz	100 µJ with 200 kHz	10 mJ with 100 kHz
Repetition rate	Single Shot to 3 MHz (50 MHz with QCW option)	Single Shot to 2 MHz (50 MHz with QCW option)	Single Shot to 1 MHz (50 MHz with QCW option)

^{This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.}

TruMicro Series 6000

High pulse energy

What makes the TruMicro Series 6000 special

Further advantages

Easy to integrate, flexible to expand – thanks to standard fieldbus interfaces