Reflected in the media: EUV lithography

In this Golem.de article, author Marc Sauter reports that Samsung Foundry has completed  development on the 5-nm process technology with extreme ultra-violet radiation (EUV), and will be accepting customer orders immediately. This new process allows a 25% increase in transistor density, while the chips exhibit a power input that is 20% lower, and a processing power that is 10% higher.

Source: www.golem.de
Author: Marc Sauter
Date of publication: 04/2019
Link: to article

In this article, Heise.de reports that in autumn 2018, Samsung started production in its first factory dedicated to 7 nm, where it exposes wafers with the EUV lithography system from ASML. Source: www.heise.de
Author: Nico Ernst
Date of publication: 10/2018
Link: to article

The TRUMPF 2017/2018 annual report highlights how controlling light – and, with that, lasers and EUV lithography – lays the foundation for future technologies such as artificial intelligence, autonomous driving and networked factories.

Source: TRUMPF annual report for fiscal year 2017/2018
Author: TRUMPF GmbH + Co. KG
Date of publication: 10/2018
Link: to article

This golem.de article announces that ASML has improved its NXW:3400B systems so significantly that cost and time-efficient series production using extreme ultraviolet radiation is within reach. Source: www.golem.de
Author: Marc Sauter
Date of publication: 07/2018
Link: to article

In this article, LaserFocusWorld traces the development of EUV technology, which spans a period of more than two decades, and explores the numerous hurdles and challenges that had to be overcome before the breakthrough in 2015.

Source: LaserFocusWorld
Author: Andreas Thoss
Date of publication: 11/2017
Link: to article

This report in the trade publication "Produktion" concerns TRUMPF's majority takeover of Access. As the manufacturer of low-power CO₂ lasers, Access Laser is one of the most important partners in TRUMPF's EUV business. Source: www.optics.org
Author: anonymous
Date of publication: 10/2017
Link: to article

The "Stuttgarter Zeitung" newspaper reports how TRUMPF, with its laser amplifier, has entered the semi-conductor industry as a supplier and founded a new subsidiary for the business. Source: Stuttgarter Zeitung
Author: Michael Heller
Date of publication: 05/2017
Link: to article

This article in weekly electronics magazine, "Markt&Technik", summarises ASML's current and planned turnover and sales volume, both of which prove that EUV lithography has finally arrived on the industrial stage. Source: Markt&Technik
Author: Heinz Arnold
Date of publication: 07/2017
Link: to article