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PDF - 845 KB
Precision in processing
Continuous improvements to the semiconductor production process are required to ensure a continuous reduction in size. This in turn requires TF generators that have an ever-higher signal quality in relation to output power and time resolution.
PDF - 806 KB
Auto Frequency Tuning
A countermeasure against rapid fluctuations in the plasma's impedance range is automatic frequency tuning, during which the RF generator sets its fundamental oscillation to a frequency value with better adaptation within a time frame of less than one millisecond.

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TRUMPF Hüttinger Service goes IoT

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RF-Systemlösung : Matchbox für höchste Prozessstabilität
Intelligent matching through real-time measurement

The new TruPlasma Match Series 1000 (G2/13) matchboxes are ideal additions to our RF generators and help to provide a comprehensive solution: the TRUMPF RF system.

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Downloads
Flyer TruPlasma RF Air Serie 1000
Flyer TruPlasma RF Air Serie 1000
pdf - 1 MB
TruPlasma RF System brochure
pdf - 6 MB
Your Retrofit Solution
pdf - 1 MB
Flyer TruPlasma RF Air Serie 1000
pdf - 1 MB
Precision in processing
pdf - 845 KB
Auto Frequency Tuning
pdf - 806 KB
Whitepaper Autofrequency Tuning
pdf - 806 KB
Whitepaper Precision in Processing
pdf - 845 KB