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TRUMPF Laser Amplifier for the production of high-performance chips
CO2 lasers

With its laser pulse, it provides the starting point for the future production of microchips.

EUV lithography – enabling progress in the digital era

EUV lithography wins the race for the microchip production method of the future. For several years, the semi-conductor industry was searching for a cost-efficient way – and a way which had the potential for mass-scale production – to enable even smaller structures to be exposed on silicon wafers. ASML, Zeiss and TRUMPF joined forces and developed a technology to produce extreme ultraviolet (EUV) light with a wavelength of 13.5 nanometres for industrial use: in a vacuum chamber, a droplet generator fires 50,000 miniscule droplets of tin per second. Each of these droplets is hit by one of the 50,000 laser pulses and turned into plasma. This is how EUV light is produced, which is then directed onto the wafers to be exposed by a mirror. The laser pulse for plasma radiation is generated by a pulsable CO2 laser system developed by TRUMPF – the TRUMPF Laser Amplifier.

From just a few watts to 40 kilowatts

The TRUMPF Laser Amplifier sequentially intensifies a laser pulse by more than 10,000 times.

Efficient and reliable

By emitting a pre pulse and main pulse, the complete power of the Laser Amplifier can be transferred to the tin droplet.

New application for CO2 laser

At the core of the high-power laser system is a CO2 laser with continuous wave operation. TRUMPF is thus creating a new application for the technology.

Large network of specialists

Over their years of close collaboration, TRUMPF, ASML and ZEISS have brought EUV technology to industrial maturity.


... make up a Laser Amplifier.

metres of

... cable are built into the system.


... is the total weight.

Central components of the TRUMPF Laser Amplifier

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Article collection for EUV lithography
Reflected in the media: EUV lithography

Learn more about EUV lithography in our highlight articles from the trade and general press.

Visual electronics

From laser processing to crystal growing, TRUMPF supplies the basic technology required to produce powerful semi-conductors in the electronics industry.

CO2 lasers

Exceptional reliability, even when the going gets tough – TruFlow CO2 lasers from TRUMPF can be found cutting and welding in production halls across the globe.

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